Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion  

作　　者：Ilhan Bok Alireza Ashtiani Yash Gokhale Jack Phillips Tianxiang Zhu Aviad Hai 

机构地区：[1]Department of Biomedical Engineering,University of Wisconsin–Madison,Madison,WI,USA [2]Department of Electrical and Computer Engineering,University of Wisconsin–Madison,Madison,WI,USA [3]Wisconsin Institute for Translational Neuroengineering(WITNe),University of Wisconsin–Madison,Madison,WI,USA

出　　处：《Microsystems & Nanoengineering》2024年第2期181-192,共12页微系统与纳米工程（英文）

基　　金：supported by the National Institute of Neurological Disorders and Stroke and the Office of the Director’s Common Fund at the National Institutes of Health(grant DP2NS122605 to A.H.);the National Institute of Biomedical Imaging and Bioengineering(grant K01EB027184 to A.H.);This material is also based upon research supported by the US Office of Naval Research under PANTHER award numbers N00014-23-1-2006 and N00014-22-1-2371 to A.H.through Dr.Timothy Bentley.

摘　　要：Circuit-integrated electromagnets are fundamental building blocks for on-chip signal transduction,modulation,and tunability,with specific applications in environmental and biomedical micromagnetometry.A primary challenge for improving performance is pushing quality limitations while minimizing size and fabrication complexity and retaining spatial capabilities.Recent efforts have exploited highly involved three-dimensional synthesis,advanced insulation,and exotic material compositions.Here,we present a rapid nanofabrication process that employs electron beam dose control for high-turn-density diamond-embedded flat spiral coils;these coils achieve efficient on-chip electromagnetic-to-optical signal conversion.Our fabrication process relies on fast 12.3 s direct writing on standard poly(methyl methacrylate)as a basis for the metal lift-off process.Prototypes with 70 micrometer overall diameters and 49–470 nm interturn spacings with corresponding inductances of 12.3–12.8 nH are developed.We utilize optical micromagnetometry to demonstrate that magnetic field generation at the center of the structure effectively correlates with finite element modeling predictions.Further designs based on our process can be integrated with photolithography to broadly enable optical magnetic sensing and spin-based computation.

关 键 词：utilize retaining HIGH 

分 类 号：TB383[一般工业技术—材料科学与工程]