Tailoring high-refractive-index nanocomposites for manufacturing of ultraviolet metasurfaces  

作　　者：Hyunjung Kang Dongkyo Oh Nara Jeon Joohoon Kim Hongyoon Kim Trevon Badloe Junsuk Rho 

机构地区：[1]Department of Mechanical Engineering,Pohang University of Science and Technology(POSTECH),Pohang,Republic of Korea [2]Graduate School of Artificial Intelligence,Pohang University of Science and Technology(POSTECH),Pohang,Republic of Korea [3]Department of Chemical Engineering,Pohang University of Science and Technology(POSTECH),Pohang,Republic of Korea [4]Department of Electrical Engineering,Pohang University of Science and Technology(POSTECH),Pohang,Republic of Korea [5]POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics,Pohang,Republic of Korea [6]National Institute of Nanomaterials Technology(NINT),Pohang,Republic of Korea

出　　处：《Microsystems & Nanoengineering》2024年第2期303-310,共8页微系统与纳米工程（英文）

基　　金：supported by the POSCO-POSTECH-RIST Convergence Research Center program funded by POSCO,the National Research Foundation(NRF)grants(NRF-2022M3C1A3081312,NRF-2019R1A5A8080290,NRF-2021M3H4A1A04086554)funded by the Ministry of Science and ICT(MSIT)of the Korean government;the Korea Evaluation Institute of Industrial Technology(KEIT)grant(no.1415179744/20019169,Alchemist project)funded by the Ministry of Trade,Industry and Energy(MOTIE)of the Korean government;T.B.acknowledges the Institute of Information&Communications Technology Planning&Evaluation(IITP)grant(no.2019-0-01906,the POSTECH Artificial Intelligence Graduate School program)funded by the MSIT of the Korean government。

摘　　要：Nanoimprint lithography(NIL)has been utilized to address the manufacturing challenges of high cost and low throughput for optical metasurfaces.To overcome the limitations inherent in conventional imprint resins characterized by a low refractive index(n),high-n nanocomposites have been introduced to directly serve as meta-atoms.However,comprehensive research on these nanocomposites is notably lacking.In this study,we focus on the composition of high-n zirconium dioxide(ZrO_(2))nanoparticle(NP)concentration and solvents used to produce ultraviolet(UV)metaholograms and quantify the transfer fidelity by the measured conversion efficiency.The utilization of 80 wt%ZrO_(2)NPs in MIBK,MEK,and acetone results in conversion efficiencies of 62.3%,51.4%,and 61.5%,respectively,at a wavelength of 325 nm.The analysis of the solvent composition and NP concentration can further enhance the manufacturing capabilities of high-n nanocomposites in NIL,enabling potential practical use of optical metasurfaces.

关 键 词：ULTRAVIOLET refractive NANOCOMPOSITES 

分 类 号：O64[理学—物理化学]