无线无源力/热传感器与测试技术研究现状  

Current Research Status of Wireless Passive Force/Thermal Sensors and Testing Technology

作　　者：谭秋林[1,2] 刘佳佳 王宁[1,2] 樊磊 张磊[1,2] 冯瑞 TAN Qiulin;LIU Jiajia;WANG Ning;FAN Lei;ZHANG Lei;FENG Rui(Key Laboratory of Micro/nano Devices and Systems,Ministry of Education Taiyuan,030051,China;State Key Laboratory of Dynamic Measurement Technology Taiyuan,030051,China)

机构地区：[1]微纳器件与系统教育部重点实验室,太原030051 [2]省部共建动态测试技术国家重点实验室,太原030051

出　　处：《振动．测试与诊断》2024年第3期419-430,614,共13页Journal of Vibration,Measurement & Diagnosis

基　　金：国家重点研发计划资助项目(2023YFB3209104,SQ2023YFB3200238);山西省重点研发计划资助项目(202102030201005)。

摘　　要：针对力热传感器多数采用有线有源的技术方案,难以适用于高温、高压、强振以及机械动力旋转部件等环境下的力热参数原位测试问题,阐述了进行无线无源传感器件研究的重要意义,并对声表面波(surface acoustic wave,简称SAW)传感器、LC谐振互感耦合传感器以及超材料传感器等3类无线无源力热传感器进行了总结及现状分析。首先,描述了无线无源力热传感器的需求情况;其次,介绍了3类传感器的工作原理、传感性能及其在独特场景下的具体应用;最后,讨论了无线无源传感器发展过程中的瓶颈问题,指出了未来可能改善和提升的发展方向。Currently,most force and thermal sensors use wired active technology solutions,which are difficult to apply to in-situ testing of force and thermal parameters under the environments of high temperature,high pressure,strong vibration,and mechanical power rotating components.Therefore,research on wireless passive sensing devices is of great significance.Wireless passive sensors mainly include LC resonant mutual inductance coupling sensors,surface acoustic wave(SAW)sensors,and metamaterial sensor.This article summarizes and analyzes the current situation of these three types of wireless passive force thermal sensors.Firstly,the demand for wireless passive force thermal sensors is described.Secondly,the working principles,sensing performance,and specific applications of three types of sensors in unique scenarios are introduced.Finally,the bottlenecks in the development process of wireless passive sensors and potential directions for improvement and enhancement in the future are discussed.

关 键 词：无线无源传感器 高温环境 高旋环境 振动测量 

分 类 号：TH113[机械工程—机械设计及理论] TB9[一般工业技术—计量学]