汽车用硫系玻璃元件红外双波段增透膜的研制  

Infrared Dual-band Antireflection Coating for Automotive Chalcogenide Glass Elements

作　　者：薛浙瀛[1] 陶长虎 陶欣 周凯 XUE Zheying;TAO Changhu;TAO Xin;ZHOU Kai(Zhejiang Agricultural Business College,Shaoxing 312000,China;Jiangsu Sheyang Secondary Vocational School,Yancheng 224300,China;School of Energy Resources,China University of Geosciences(Beijing),Beijing100083,China;Jiangling Motors Co.Ltd.Product R&D Center,Nanchang 330001,China)

机构地区：[1]浙江农业商贸职业学院,浙江绍兴312000 [2]江苏省射阳中等专业学校,江苏盐城224300 [3]中国地质大学(北京)能源学院,北京100083 [4]江铃汽车股份有限公司产品研发总院,江西南昌330001

出　　处：《红外技术》2024年第6期728-734,共7页Infrared Technology

基　　金：国家自然科学基金(12002320);浙江省教育厅一般课题项目(KY201905)。

摘　　要：基于硫系玻璃IRG206(As40Se60)基底,研制了3.7~4.8μm及7.5~9.5μm双波段增透膜,可用于汽车红外夜视成像系统。采用电子束和电阻蒸发离子辅助沉积技术,结合化学键分析选取连接层材料,提高基底与膜层之间的结合力;利用离子辅助应力调控技术,优化膜层应力,实现膜层应力的匹配,解决硫系玻璃表面脱膜问题。测试结果表明,该膜层在3.7~4.8μm波段平均透过率为98.31%,在7.5~9.5μm波段平均透过率为97.43%,通过了牢固度、盐雾、高低温、摩擦等环境测试,能够满足汽车红外夜视成像系统的使用要求。Based on the chalcogenide glass IRG206(As40Se60)substrate,3.7-4.8 mm and 7.5-9.5 mm dual-band antireflection coatings were developed,which can be used in automotive infrared night-vision imaging systems.Using electron beam and resistance evaporation ion-assisted deposition technology,combined with chemical bond analysis,the connecting layer material was selected to improve the adhesion between the substrate and film layer.Ion-assisted stress control technology was used to optimize the stress of the film layer and realize the matching of the stress of the film layer,to solve the problem of chalcogenide glass stripping.In test results,the average transmittance of the film layer in the 3.7-4.8 mm and 7.5-9.5 mm bands was 98.31%and 97.43%,respectively,passing environmental tests such as firmness,salt spray,high and low temperature,and abrasion,thereby satisfying the requirements of the automotive infrared night-vision imaging system.

关 键 词：薄膜 硫系玻璃 应力调控 连接层技术 红外夜视成像系统 

分 类 号：O484[理学—固体物理]