双层SiO_(2)宽谱带减反射涂层的制备及性能表征  

Preparation and Characterization of Broadband Antireflective Double-Layer Silica Coating

作　　者：赵昊森 肖志葳 王逸翔 贾红宝[1] 朱世海 ZHAO Haosen;XIAO Zhiwei;WANG Yixiang;JIA Hongbao;ZHU Shihai(School of Science,University of Science and Technology LiaoNing,Anshan 114051,China)

机构地区：[1]辽宁科技大学理学院,辽宁鞍山114051

出　　处：《大学物理实验》2024年第3期27-32,共6页Physical Experiment of College

基　　金：辽宁省教育厅基本科研项目-面上项目(LJKMZ20220641,JYTMS20230949);“辽宁科技大学高能光电交叉学科团队”基金。

摘　　要：采用无模板溶胶-凝胶法,成功制备在可见光范围内具有高透射率和良好疏水性的宽谱带减反射双层SiO_(2)涂层。采用提拉法在石英基底上沉积SiO_(2)双层涂层,底层和顶层的折射率分别为1.34和1.15。其中,底层由酸催化和碱催化混合SiO_(2)溶胶制备得到,顶层薄膜的溶胶是使用六甲基二硅氮烷(HMDS)作为改性剂,制备得到三甲基硅烷化的SiO_(2)纳米粒子体系。根据优化膜系设计要求,选择合适工艺参数镀制双层涂层,测试结果显示,SiO_(2)双层涂层在可见光区的平均透射率为98.64%,静态水接触角可达134°。A broadband antireflective SiO_(2)coating with high transmittance and good hydrophobicity in the visible range was successfully prepared by template-free sol-gel method.The refractive indices of the bottom layer and top layer of the coating are 1.34 and 1.15,respectively.The bottom layer was prepared by mixing SiO_(2)sols catalyzed by acid and base,and the sol of the top layer was prepared by using hexamethyldisilazane(HMDS)as modifier,which is composed of trimethylsilanized SiO_(2)nanoparticles.According to the design requirements of the optimized film system,suitable technological parameters were selected to prepare the double-layer coating.The test results show that the average transmittance of the SiO_(2)double-layer coating in the visible light region is 98.64%,and the static water contact angle can reach 134°.

关 键 词：溶胶-凝胶法 酸碱混合SiO_(2)溶胶 减反射薄膜 表面有机改性 

分 类 号：O484.5[理学—固体物理]