双控制模式MEMS风速风向传感器设计、仿真及制备  

Design,Simulation and Fabrication of MEMS Wind Speed and Direction Sensor with Dual Control Mode

作　　者：田舟洲 谢雨珏 易真翔 秦明[1] TIAN Zhouzhou;XIE Yujue;YI Zhenxiang;QIN Ming(School of Electronic Science and Engineering,Southeast University,Nanjing Jiangsu 210096,China)

机构地区：[1]东南大学电子科学与工程学院,江苏南京210096

出　　处：《传感技术学报》2024年第5期750-755,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61727812)。

摘　　要：针对恒温差模式下的MEMS风速风向传感器量程较小等问题,首次提出了一种恒温差和温度平衡双控制模式的MEMS风速风向传感器芯片。通过改变加热、测温电阻在传感器芯片的位置以及加热电阻的工作状态,用于实现传感器在低风速和高风速下处于不同的工作模式,从而使得传感器在不同风速下均有较为准确的输出结果。分别通过理论分析、有限元仿真证明了该传感器的量程可达0~75 m/s,采用温度平衡控制模式替代恒温差模式有效解决了恒温差控制模式高风速下传感器输出饱和的问题。此外,设计了该传感器的流片工艺,并利用MEMS工艺对其进行了制备。To solve the problem that the measurement range of MEMS thermal wind sensor chip applied in CTD mode is small,a MEMS thermal wind sensor chip applied in CTD mode/TB mode control is proposed for the first time.By changing the position of heater and temperature resistance in the sensor chip and the working state of the heater,the sensor used to achieve different working modes under low and high wind speed,so that more accurate output results can be obtained under different wind speed.Theoretical analysis and simulation respectively prove that the measurement range of the sensor can reach 0-75 m/s,Using TB mode instead of CTD mode effectively solves the problem of saturation of sensor output under CTD mode at high wind speed.In addition,the flow sheet technology of the sensor is designed and fabricated by using MEMS technology.

关 键 词：微机电系统(MEMS) 热式风速风向传感器 恒温差模式 温度平衡模式 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]