大抽速氙气泵优化设计研究  

Study on optimal design of xenon air pump with high pumping speed

作　　者：武义锋[1,2] 曾环 王君 杨杨 邓家良 Wu Yifeng;Zeng Huan;Wang Jun;Yang Yang;Deng Jiaiang(Anhui Vacree Technologies Co.,Ltd,Hefei 230043,China;The 16th Institute of CETC,Hefei 230088,China)

机构地区：[1]安徽万瑞冷电科技有限公司,合肥230043 [2]中国电子科技集团第十六研究所,合肥230088

出　　处：《低温与超导》2024年第5期95-100,共6页Cryogenics and Superconductivity

基　　金：国家科技重大专项项目(2014ZX02001-003)资助。

摘　　要：介绍了500 mm口径大抽速氙气泵的抽气原理、结构、一级冷板优化设计和抽速测试。通过氙气和氮气抽气速率测试对比,该款大抽速氙气泵的氙气抽速与氮气抽速相近,实际抽速高达10 500 L/s,抽氙速率提高了1倍以上。大抽速氙气泵除了具有较优的抽氙性能,同时具备常规低温泵所有性能。该泵可一泵多用,为客户节约了采购和安装成本。The pumping principle,structure,optimization design of the first-stage cold plate and pumping speed test of the 500 mm caliber high-speed xenon cryopump were introduced.Through the test comparison of xenon and nitrogen pumping rates,the xenon and nitrogen speed of this high-pumping xenon pump are similar.The actual performance of pumping xenon speed is up to 10500 L/s,which is twice that of conventional cryopumps for xenon.In addition to the excellent xenon pumping performance,the high-speed xenon pump has all the performance of conventional cryopumps.The pump can be used for multiple purposes,saving procurement and installation costs for customers.

关 键 词：大抽速氙气泵 低温泵 抽气速率 

分 类 号：TB752.53[一般工业技术—真空技术]