激光复合加工硬脆性材料研究进展综述  

Review of Research Progress in Laser-based Hybrid Machining of Hard and Brittle Materials

作　　者：温秋玲 杨野 黄辉 黄国钦[1,2] 胡中伟 陈金鸿[1,2] 汪晖 吴贤[2,3] WEN Qiuling;YANG Ye;HUANG Hui;HUANG Guoqin;HU Zhongwei;CHEN Jinhong;WANG Hui;WU Xian(Institute of Manufacturing Engineering,Huaqiao University,Xiamen 361021;State Key Laboratory of High Performance Tools,Huaqiao University,Xiamen 361021;School of Electromechanical and Automation,Huaqiao University,Xiamen 361021)

机构地区：[1]华侨大学制造工程研究院,厦门361021 [2]高性能工具全国重点实验室(华侨大学),厦门361021 [3]华侨大学机电及自动化学院,厦门361021

出　　处：《机械工程学报》2024年第9期168-188,共21页Journal of Mechanical Engineering

基　　金：国家重点研发计划(2023YFB3407200);高等学校学科创新引智计划(B23011);教育部创新团队滚动计划(IRT_17R41);福建省自然科学基金(2021J01322)资助项目。

摘　　要：玻璃、半导体、蓝宝石、陶瓷和硬质合金等硬脆性材料被广泛应用于建筑、生物医疗、航空航天、集成电路、新能源、光电显示、轨道交通、海洋等领域。但是其高硬度、大脆性、高耐磨性和耐腐蚀等特性也给它们的加工带来巨大挑战。目前,机械加工、离子束加工、化学蚀刻、激光加工等方式是加工硬脆性材料的主要方法。但是这些加工方式依然存在加工效率和加工质量不可兼得的瓶颈问题。为此,研究人员提出了将激光加工和其他加工方式结合起来的复合加工方法,旨在实现硬脆性材料的高质量和高效率加工。概述了主流的基于激光复合的硬脆材料加工方法,主要包括其他方式辅助激光加工、激光辅助其他方式加工、激光辅助激光加工;重点阐述了这些激光复合加工技术的加工原理、研究现状和加工效果;总结了不同激光复合加工方法的优势、局限性和应用场景,最后对激光复合加工硬脆性材料的未来发展趋势提出了展望。Hard and brittle materials such as glass,semiconductor,sapphire,ceramics and hard alloy are widely used in construction industry,biomedicine,aerospace,integrated circuits,new energy,photoelectric display,rail transit,ocean and other fields.However,their high hardness,brittleness,wear resistance and corrosion resistance also bring great challenges to their processing.At present,mechanical machining,ion beam etching,chemical etching,and laser machining are the main methods for machining hard and brittle materials.However,these processing methods still face the bottleneck problem that processing efficiency and processing quality cannot be achieved simultaneously.To overcome the problems mentioned above,researchers have proposed a hybrid processing method that combines laser processing and other processing methods.This study outlines the mainstream methods of laser-based hybrid processing of hard and brittle materials,including laser-assisted other methods processing,other methods-assisted laser processing,and laser assisted laser processing.The processing principle,research status,and processing results evaluation of these laser-based hybrid machining technologies are highlighted.The advantages,limitations,and applications of different laser-based hybrid machining methods are summarized.Finally,the future development trend of laser laser-based hybrid machining of hard brittle materials is presented.

关 键 词：激光复合加工 硬脆性材料 加工效率 加工质量 微结构 

分 类 号：V261[航空宇航科学与技术—航空宇航制造工程] TH162[机械工程—机械制造及自动化]