电弧离子镀TiN/ZrN多层膜力学性能研究  

Mechanical Properties of TiN/ZrN Multilayers by Arc Ion Plating

作　　者：杨皓 郭圆萌 东帅 黄美东 YANG Hao;GUO Yuanmeng;DONG Shuai;HUANG Meidong(College of Physics and Materials Science,Tianjin Normal University,Tianjin 300387,China)

机构地区：[1]天津师范大学物理与材料科学学院,天津300387

出　　处：《真空科学与技术学报》2024年第6期537-542,共6页Chinese Journal of Vacuum Science and Technology

摘　　要：采用电弧离子镀制备了调制比和总厚度一定,周期数不同的一系列TiN/ZrN多层膜,研究了周期数对多层膜力学性能的影响。使用X射线衍射仪、扫描电子显微镜分析了多层膜的结构形貌,利用显微硬度计、往复摩擦试验机和多功能材料表面性能试验仪测试了薄膜的力学性能和摩擦学性能。结果表明,多层膜都呈现单一的面心立方结构,以柱状晶结构生长,表面致密光滑,界面效应明显,力学性能受到界面结构和择优取向的影响,当周期数为50时,TiN具有明显的(200)择优取向,多层膜的硬度达到最大值2568 Hv,多层膜的摩擦学性能受到表面形貌和硬度的影响,当周期数为40时,具有最低的摩擦系数为0.47,磨损率随着硬度的增加而减少,在50周期时的磨损率为6.9×10^(-6)mm^(3)·N^(-1)·m^(-1),耐磨性最佳。A series of TiN/ZrN multilayer films,characterized by a consistent modulation ratio and total thickness but varying numbers of periods,were meticulously fabricated through arc ion plating.This study delved into the impact of the number of periods on mechanical properties of these multilayer films.Structural and morphological analyses were conducted utilizing X-ray diffraction and scanning electron microscopy,respectively.To evaluate the mechanical and tribological attributes of the films,a battery of tests was employed,including a microhardness tester,a reciprocating friction and wear tester,and a multifunctional material surface performance tester.The findings elucidated that all multilayer films displayed a singular face-centered cubic structure featuring columnar crystal growth,a compact and smooth surface,and distinctive interface effects.The mechanical properties were intricately linked to both the interface structure and preferred orientation.Notably,at 50 periods,TiN exhibited a pronounced(200)preferred orientation,resulting in the multilayer films reaching their pinnacle hardness at 2568 Hv.Tribological properties were discernibly affected by both surface morphology and hardness.The film with 40 periods demonstrated the lowest friction coefficient at 0.47,and wear rates exhibited a decreasing trend with escalating hardness.At 50 periods,the wear rate attained an optimal value of 6.9×10^(-6) mm^(3)·N^(-1)·m^(-1),indicative of superior wear resistance.

关 键 词：电弧离子镀 多层膜 调制周期 硬度 摩擦学性能 

分 类 号：TB383.2[一般工业技术—材料科学与工程]