波长调制型PMMA光波导SPR传感器敏感单元设计  

Design of Wavelength Modulation PMMA Optical Waveguide SPR Sensing Structure for Refractive Index Sensing

作　　者：于永浩 周声超 张美玲 张荣[1] 孔梅[1] YU Yonghao;ZHOU Shengchao;ZHANG Meiling;ZHANG Rong;KONG Mei(School of Physics,Changchun University of Science and Technology,Changchun 130022,CHN)

机构地区：[1]长春理工大学物理学院,长春130022

出　　处：《半导体光电》2024年第3期406-409,共4页Semiconductor Optoelectronics

基　　金：基于表面等离激元谐振(SPR)的光纤微流控生物传感技术研究项目(KYC-HK-XM-2021-023).

摘　　要：光波导表面等离激元共振(SPR)传感器具有尺寸小、免标记、易集成等优点。文章设计了一种基于波长调制方法的聚甲基丙烯酸甲酯(PMMA)脊型波导SPR传感器,并对其关键参数进行了优化。结果表明,该敏感单元在待测液折射率为1.33~1.45的范围内能够稳定工作,在高折射率检测区,传感器展现出了高达10220nm/RIU的灵敏度和173RIU^(-1)的高品质因数。Optical-waveguide surface plasmon resonance(SPR)sensors are characterized by small sizes,label-free detection capabilities,and ease of integration.In this study,we designed a poly(methyl methacrylate)(PMMA)ridge waveguide SPR sensor sensitive unit based on a wavelength modulation method and optimized its key parameters.Our analysis results showed that the sensor could operate stably within a liquid-refractive-index testing range of 1.33~1.45.In the high-refractive-index detection region,the sensor exhibited a sensitivity of up to 10220nm/RIU and a high quality factor of 173RIU^(-1).

关 键 词：表面等离激元共振 折射率传感 聚甲基丙烯酸甲酯 光波导传感器 

分 类 号：TN252[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]