面内驱动旋转超声电机的研究进展  

Research Progress of the Rotating Ultrasonic Motors Based on In-plane Mode

作　　者：陈建毅[1] 林星陵[1] 吴庆勇[1] 蒋丽省 CHEN Jianyi;LIN Xingling;WU Qingyong;JIANG Lisheng(School of Intelligent Manufacturing,Xiamen City University,Xiamen Fujian 361008,China;Division of Finance and Asset Management,Xiamen City University,Xiamen Fujian 361008,China)

机构地区：[1]厦门城市职业学院智能制造学院,福建厦门361008 [2]厦门城市职业学院财务与资产管理处,福建厦门361008

出　　处：《微电机》2024年第6期69-74,共6页Micromotors

基　　金：厦门市自然科学基金项目(3502Z20227431);福建省中青年教师教育科研项目(科技类)(JAT201347);福建省海洋新能源和智能装备应用技术协同创新中心资助。

摘　　要：超声电机利用压电陶瓷的逆压电效应和机械共振来获得其运动和力矩,具有响应快速、定位精度好、可直接驱动等诸多优点,在精密驱动、航空航天、生物医学等领域具有独特的应用优势和成功应用,已有成熟产品实现产业化。基于面内振动模态的微小型超声电机是目前相关研究最易于微小型化的一类,在微机电系统领域具有很好的应用潜力和空间。首先,介绍了超声电机的工作原理;其次,针对夹心式换能器定子结构和贴片式定子结构两种类型面内驱动旋转超声电机,从不同的结构形式、输出性能、应用研究方面归纳总结相关研究的新进展和新成果,比较分析了几种电机样机的主要性能;最后,指出需要深入研究和技术突破的几个问题。The ultrasonic motor works based on the inverse piezoelectric effect of piezoelectric ceramics and mechanical resonance to obtain its motion and torque.It has a lot of excellent merits,such as fast response,high positioning accuracy and can be directly driven.It has unique application advantages in fields such as precision drives,aerospace,biomedicine,etc.Several mature products have been successfully applied and industrialized.Currently,micro ultrasonic motors based on in-plane vibration modes are the most prone to miniaturization,and have great potential and space for application in the field of micro-electromechanical systems.Firstly,the working principle of ultrasonic motors was introduced.Secondly,two types of in-plane driving rotary ultrasonic motors were reviewed in terms of two stator structural forms,namely sandwich type transducer stator structure and patch type stator structure.The new developments and achievements in related research were summarized from different structures,output performance,and application research.Moreover,the main performance of several motor prototypes was compared and analyzed.Finally,several issues were pointed out that require further research and breakthroughs.

关 键 词：超声电机 面内模态 工作原理 夹心式换能器 贴片式 

分 类 号：TM359.9[电气工程—电机]