同面阵列电容传感器输出信号质量评估研究  

Co-planar Array Capacitive Sensor Output Signal Quality Evaluation

作　　者：李瑞航 张玉燕[1] 温银堂[1] 潘钊[1] 李泓漾 LI Ruihang;ZHANG Yuyan;WEN Yintang;PAN Zhao;LI Hongyang(Key Lab of Measurement Technology and Instrumentation of Hebei Province,Yanshan University,Qinhuangdao,Hebei 066004,China)

机构地区：[1]燕山大学测量技术与仪器重点实验室,河北秦皇岛066004

出　　处：《计量学报》2024年第6期915-921,共7页Acta Metrologica Sinica

基　　金：河北省自然科学基金(F2021203024);河北省科技计划项目(216Z1704G)。

摘　　要：通过有限元仿真和实验系统评估了3×4阵列电极同面电容传感器电极对输出信号质量。结果表明,减少电极间距和增加接触边缘长度有利于提高电极对输出信号质量。提出了一种评估同面电容传感器输出信号质量的指标——电极利用率。对不同独立电极数量电极利用率的输出信号质量进行了评估。结果表明,增加独立电极数量只能在一定程度上增加有效输出信息,且引入大量噪声。随着独立电极数量增加,电极利用率下降,解释了独立电极数量增加输出信号质量反而下降的原因。图像重建结果与电极利用率分析结论一致。实验和仿真结果验证了电极利用率评估多电极同面电容传感器输出信号质量的有效性。该方法和结论可为同面电容传感器阵列电极设计和输出信号处理提供参考。The output signal quality of a 12-electrode co-planar capacitive sensor(CCS)for each electrode pair was systematically evaluated by finite element simulations and experiments.The results showed that the output signal quality of the electrode pairs was mainly related to the electrode spacing and the contact edge length.Reducing the electrode spacing and increasing the contact edge length are beneficial for improving the output signal quality.An electrode utilization rate(EUR)method was proposed to evaluate the output signal quality of CCS.The output signal quality of CCS with different number of independent electrodes was evaluated by combining EUR.According to the findings,adding more independent electrodes barely improved the useful output information and generated a significant amount of noise.The EUR value declines as the number of independent electrodes rises,which implies that adding more independent electrodes lowers the output signal s quality.The outcomes of the image reconstruction were in agreement with the results of the EUR analysis.The effectiveness of EUR for evaluating the output signal quality of multi-electrode CCS was verified experimentally and in simulation.The methods and conclusions may provide a reference for CCS array electrode design and output signal processing.

关 键 词：电容层析成像 同面阵列电容检测 同面电容传感器 信号质量评估 电极利用率 

分 类 号：TB971[一般工业技术—计量学] TP212[机械工程—测试计量技术及仪器]