超声波液体处理中声场分布与换能器特性研究  

Research of Acoustic Field Distribution and Transducer Characteristics in Ultrasonic Liquid Treatment

作　　者：岳晨曦 高攀 罗锡棋 黄一马 陈遥 王焕泽 董林玺[1,2] YUE Chenxi;GAO Pan;LUO Xiqi;HUANG Yima;CHEN Yao;WANG Huanze;DONG Linxi(Smart Microsensors and Microsystems Engineering Research Center of Ministry of Education,College of Electronics and Information,Hangzhou Diazi University,Hangzhou Zhejiang 310018,China;Zhejiang Hongzhen Intelligent Chip Co.,Ltd.,Huzhou Zhejiang,313200,China)

机构地区：[1]杭州电子科技大学电子信息学院智能微传感器与微系统教育部工程中心,浙江杭州310018 [2]浙江宏振智能芯片有限公司,浙江湖州313200

出　　处：《传感技术学报》2024年第6期951-958,共8页Chinese Journal of Sensors and Actuators

基　　金：国家重点研发计划项目(2018YFB2002900);国家自然科学基金项目(61871167,U1909221);浙江省级人才项目(2021R52009)。

摘　　要：为了提高换能器的控制精度,从理论和实验方面研究了超声波液体处理中的负载液体声场分布与超声波换能器振动性能。采用有限元分析软件对设计的超声波换能器和振动系统进行仿真研究,通过COMSOL进行模态分析,研究了换能器谐振频率等参数;建立实际液体处理有限元模型并对超声振动系统进行压力声学分析,得到负载液体中的声压、声强度等参数。基于ASIC锁频芯片实现超声振动系统频率的实时控制,实验表明换能器的实际谐振频率与仿真谐振频率误差仅为0.12%,实际输出振幅误差小于0.5μm,声强误差小于0.1 W/cm2。仿真模型与实际误差较小,能精准预测换能器的工作状态,有助于指导换能器的设计、液体声场的分析。To improve the control accuracy of the transducer,the load liquid acoustic field distribution and the vibration performance of the ultrasonic transducer in ultrasonic liquid treatment are studied from theoretical and experimental aspects.The finite element analysis software is used to simulate the designed ultrasonic transducer and vibration system,and the parameters such as resonant frequency of the transducer are studied by modal analysis through COMSOL,and the actual liquid treatment finite element model is established and the pressure acoustic analysis is performed on the ultrasonic vibration system to obtain the parameters such as sound pressure and sound intensity in the load liquid.The real-time control of ultrasonic vibration system frequency is realized based on the integrated chip,and the experiment shows that the actual resonant frequency of the transducer has only 0.12%error with the simulated resonant frequency,the actual output amplitude error is less than 0.5μm,and the sound intensity error is less than 0.1 W/cm2.The simulation model has a small error with the actual one,which can accurately predict the operating state of the transducer and help guide the design of the trans-ducer and the analysis of the liquid sound field.

关 键 词：超声波液体处理 超声波换能器 仿真分析 锁频芯片 

分 类 号：TB559[理学—物理]