大量程高线性光谱共焦位移测量系统  

Chromatic confocal displacement measurement system with large range and high linearity

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作  者:肖康[1,2,3] 陈小君 吴永前[1,2,3] XIAO Kang;CHEN Xiaojun;WU Yongqian(National Key Laboratory of Optical Field Manipulation Science and Technology,Chinese Academy of Sciences,Chengdu 610209,China;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区:[1]中国科学院光场调控科学技术全国重点实验室,成都610209 [2]中国科学院光电技术研究所,成都610209 [3]中国科学院大学,北京100049

出  处:《激光杂志》2024年第6期33-38,共6页Laser Journal

摘  要:兼具高精度、高稳定性并能实现非接触测量的光谱共焦位移测量系统在工业、医疗、科研等许多领域得到了广泛应用。目前制约光谱共焦位移测量系统应用发展的因素是大量程和高线性度。讨论了光谱共焦位移测量系统中色散物镜实现线性轴向色散的条件,设计了一种高线性色散和大色散范围的色散物镜,指定了适合的公差范围,加工装配了一组色散物镜,搭建了光谱共焦位移测量系统,采用双频激光干涉仪进行了位移标定,并对标准量块进行了厚度测量。结果表明,该系统工作波段为450 nm~650 nm,实际位移范围为10 200μm,线性拟合判定系数R^(2)达到0.993 7,实际测量最大误差仅为3μm,证明该光谱共焦位移测量系统同时具备大量程、高线性度和高测量精度的特点。The chromatic confocal displacement measurement system,which has high accuracy and stability and can realize non-contact measurement,has been widely used in many fields such as industry,medical care and scien-tific research.At present,the factors restricting the application and development of chromatic confocal displacement measurement system are large range and high linearity.In this paper,the conditions of realizing linear axial dispersion of dispersive objective lens in a chromatic confocal displacement measurement system are discussed,and a kind of dis-persive objective lens with high linear dispersion and large dispersion range is designed,and the appropriate tolerance range is specified,and a group of dispersive objective lenses are processed and assembled.A chromatic confocal dis-placement measurement system was established,and the displacement was calibrated by a dual-frequency laser inter-ferometer,and the thickness of the standard gauge block was measured.The results show that the working band of the system is 450~650 nm,the range is 10200μm,the linear fitting judgment coefficient R^(2)reaches 0.9937,and the maximum displacement error of actual measurement is only 3μm,which proves that the chromatic confocal displace-ment measurement system has the characteristics of large range,high linearity and high measurement accuracy,and has a good application prospect.

关 键 词:光谱共焦 色散物镜 位移测量 非接触 光学设计 

分 类 号:TN911[电子电信—通信与信息系统]

 

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