实现超导量子比特芯片的微纳加工方法  

MICROFABRICATION METHODS FOR REALIZING SUPERCONDUCTING QUBIT CHIPS

作　　者：宿非凡 杨钊华 SU Feifan;YANG Zhaohua(China Electronics Information Industry Group Great Wall Laboratory,Changsha,Hunan 410205;Tianjin Advanced Technology Research Institute,Tianjin 300459;Hefei National Laboratory,Hefei,Anhui 230094;Institute of physics Chinese Academy of Science,Beijing 100190)

机构地区：[1]中国电子信息产业集团长城实验室,湖南长沙410205 [2]天津先进技术研究院,天津300459 [3]合肥国家实验室,安徽合肥230094 [4]中国科学院物理研究所,北京100190

出　　处：《物理与工程》2024年第2期10-18,共9页Physics and Engineering

摘　　要：近年来随着各个科技强国和科技巨头企业的高度重视,超导量子计算技术发展迅速,在不到10年的时间内单个超导量子比特的退相干时间增长了5个数量级,从纳秒提高到了百微秒的量级,并有望提高到毫秒量级甚至秒的量级。超导量子比特芯片的制备是实现超导量子计算的基础,作为“物理前沿介绍——超导量子计算”系列的第六篇,本文系统阐述制备超导量子比特及其辅助器件芯片的微纳加工方法,并对制备方法的发展趋势作展望。通过本文,旨在帮助广大高校物理专业教师、高年级本科生、研究生以及对超导量子计算感兴趣的理工科背景读者系统了解实现超导量子比特芯片的微加工方法与工艺,全面地、实物化地理解超导量子计算技术。In recent years,with the high attention of various technological powers and giants,superconducting quantum computing technology has developed rapidly.In less than 10 years,the decoherence time of a single superconducting qubit has increased by 5 orders of magnitude,from nanoseconds to hundreds of microseconds,and is expected to increase to millisecond or even second levels.The preparation of superconducting qubit chips is the foundation for achieving superconducting quantum computing.As the sixth article in the“Introduction to Physical Frontiers—Superconducting Quantum Computing”series,this article systematically elaborates on the micro-fabrication methods for preparing superconducting qubits and co-auxiliary device chips,and looks forward to the development trend of fabrication methods.Through this article,the aim is to help university physics teachers,senior undergraduate and graduate students,as well as readers with a background in science and engineering who are interested in superconducting quantum computing,systematically understand the micro-fabrication methods and processes for implementing superconducting qubit chips,and gain a comprehensive and practical understanding of superconducting quantum computing technology.

关 键 词：超导量子比特 约瑟夫森结 空气桥 

分 类 号：O413[理学—理论物理] TN405[理学—物理]