基于夹层氮化硅波导的可见-中红外超连续谱特性研究  

Characterization of visible-mid-infrared supercontinuum spectrum based on sandwiched silicon nitride waveguide

作　　者：孙嘉浩 程如敏 郭凯 尹金德 卿笃安 李玲[1] 闫培光[1] SUN Jia-Hao;CHENG Ru-Min;GUO Kai;YIN Jin-De;QING Du-An;LI Ling;YAN Pei-Guang(Shenzhen Key Laboratory of Laser Engineering,School of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China;Institute of Systems Engineering,Academy of Military Science,Beijing 100141,China;Shenzhen Noonan Intelligent Co.,Ltd.,Shenzhen 518107,China)

机构地区：[1]深圳大学物理与光电工程学院深圳市激光工程重点实验室,广东深圳518060 [2]军事科学院系统工程研究院,北京100141 [3]深圳市诺安智能股份有限公司,广东深圳518107

出　　处：《红外与毫米波学报》2024年第3期293-299,共7页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(12074264);深圳市科技计划项目(JCYJ20220818095604010)。

摘　　要：提出一种低厚度氮化硅-蓝宝石-氮化硅夹层波导结构。利用其色散波辐射现象和中红外相位匹配条件,结合波导脉冲传输模型,讨论了夹层波导不同物理尺寸对相位匹配点和光谱展宽的影响,数值模拟获得了0.5~4μm的超连续谱展宽,并且在-40 dB水平下具有更远中红外色散波产生。通过该模型,详细解释了非线性波导脉冲传输的潜在机制。理论模型分析表明,通过优化氮化硅及蓝宝石夹层的物理尺寸,进而改变相位匹配条件,可以在较宽的波长范围内控制色散波的位置。This paper introduces a low-thickness sandwich waveguide structure comprising silicon nitride-sapphire-silicon nitride layers.By exploiting its dispersion wave radiation effect and mid-infrared phase matching condition,combined with the waveguide pulse transmission model,this study examines the impact of different physical sizes of the sandwich waveguide on the phase matching point and spectral broadening.Through numerical simulation,a supercontinuum spectrum ranging from 0.5 to 4μm is generated,producing a farther mid-infrared dispersion wave at a-40 dB level.Moreover,this model provides an in-depth mechanism for nonlinear waveguide pulse transmission.Theoretical analysis reveals that modifying the physical size of the silicon nitride and sapphire interlayer and altering the phasematching conditions can regulate the position of the dispersion wave across a broader wavelength range.

关 键 词：非线性光学 超连续谱 中红外 色散工程 氮化硅 

分 类 号：TN252[电子电信—物理电子学]