ArF准分子激光器脉冲参数高精度在线测量系统设计与实现  

Design and implementation of high precision on-line measurement system for pulse parameters of ArF Excimer laser

作　　者：赵万琦 江锐 冯泽斌 许泽 郭宁 蒋衍 朱精果 ZHAO Wanqi;JIANG Rui;FENG Zebin;XU Ze;GUO Ning;JIANG Yan;ZHU Jingguo(Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China;Beijing RSLaser Opto-Electronics Technology Co.Ltd.,Beijing 100176,China)

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京100049 [3]北京科益虹源光电技术有限公司,北京100176

出　　处：《红外与激光工程》2024年第6期71-80,共10页Infrared and Laser Engineering

基　　金：国家科技重大专项项目(2016ZX02201002)。

摘　　要：保持激光光源输出能量稳定是光刻的关键环节,需要对深紫外准分子光源脉冲参数进行高精度在线测量。传统的准分子激光器能量测量装置多工作于低重复频率,针对高重频准分子激光器脉冲测量需求,设计了激光脉冲参数在线测量系统,使用峰值保持电路配合模数转换器实现脉冲能量采集,通过建立并仿真峰值保持电路寄生等效模型,优化了高重频准分子激光脉冲峰值保持电路设计方法。所设计的系统在193nm ArF准分子光源平台上测试,实现了准分子光源脉冲参数的在线提取和能量实时高精度测量。经测试,光源在6kHz频率时,系统能量测量值相对于标准能量计的平均相对误差为0.22%,最大相对误差为0.56%,线性度为99.83%,为光刻深紫外准分子光源脉冲参数在线高精度测量系统的实际应用做了有益探索。Objective The laser with stable output energy is critical for lithography.For the closed-loop control of the deep-ultraviolet excimer light source,the laser pulse parameters need to be measured on-line with high precision.Traditional excimer laser energy measurement devices are based on low repetition rate.In order to meet the pulse measurement requirements of high repetition rate excimer lasers,the on-line measurement system for pulse parameters of high repetition rate excimer laser is designed.The pulse energy acquisition is realized by using peak holding circuit and high speed ADC.The optimization method for peak holding circuit design is proposed by simulating the parasitic equivalent model of peak holding circuit.Methods The measurement system for pulse parameters that is designed includes the light path of the former stage and the processing circuit of the latter stage.The measurement system for pulse parameters is placed at the output of the main optical path,and the laser output light passes through the beam splitter,with 95%of the energy output light being used for subsequent lithography work,and 5%of the output light being used for detection,which effectively reduces the loss of the output signal,as shown in Fig.4.The block diagram of the detection circuit is shown in Fig.5.The principle and transient analysis of the peak holding circuit are shown in Fig.6-8.The detection circuit includes a trans-impedance amplification circuit,a filter circuit,a peak holding circuit,and a switching circuit for synchronous triggering of the signal.The peak voltage is maintained and broadened by the peak holding circuit,then the peak value is sampled by a 16-bit 20 MHz high-speed and high-precision ADC,and the collected signal is processed by FPGA.Results and Discussions The test performance of the measurement system for pulse parameters is carried out with an ArF excimer laser.The output of the measurement system for pulse parameters is square wave signal with wide pulse width,which is convenient for ADC acquisition.The

关 键 词：能量探测 在线测量 准分子激光 脉冲参数 线性度 

分 类 号：TN248.2[电子电信—物理电子学]