扫描电镜示值误差测量不确定度评定分析  

Evaluation and Analysis of Measurement Uncertainty in Scanning Electron Microscope Indication Error

作　　者：李庆贤 LI Qingxian(Fangyuan Calibration and Test Technology(Fujian)Institute Co.,Ltd.Xiamen 361000,Fujian,China)

机构地区：[1]方圆校准检测科技(福建)研究院有限公司,福建厦门361000

出　　处：《市场监管与质量技术研究》2024年第3期10-12,20,共4页Market Regulation and Quality Technology Research

摘　　要：文中介绍了扫描电子显微镜的原理和应用,分析了扫描电子显微镜测长示值误差的不确定度来源,包括测量重复性,测量电压,测量距离,测量倍数,图像分辨率以及标准栅格样板。文中以测量1μm标准栅格样板为例,评定各个标准不确定度分量,计算合成标准不确定度和扩展不确定度,评定结果为5.4nm,小于扫描电子显微镜测长示值误差计量特性1/3MPE的要求。文章对扫描电子显微镜示值误差的测量不确定度评定提供参考和帮助。The article introduces the principles and applications of scanning electron microscopys and analyzes the sources of uncertainty in the measurement of length indication errors of SEM,including measurement repeatability,measurement voltage,measurement distance,measurement multiple,image resolution,and standard grid template.Taking the measurement of a 1μm standard grid template as an example,the article evaluates the individual standard uncertainty components,calculates the combined standard uncertainty and expanded uncertainty,and finds the evaluation result to be 5.4nm,which is less than one-third of the measurement performance evaluation(MPE)requirement for length measurement errors in SEMs..The article provides reference and assistance for evaluating the measurement uncertainty of scanning electron microscope indication error.

关 键 词：扫描电子显微镜 测量不确定度 计量 测量电压 

分 类 号：TN16[电子电信—物理电子学]