A high precision two-axis GMR angular sensor manufactured by post-annealing  

作　　者：Zitong ZHOU Zhiqiang CAO Shaohua YAN Xiaolong WANG Libo XIE Shiyang LU Dapeng ZHU Qunwen LENG Weisheng ZHAO 

机构地区：[1]School of Integrated Circuit Science and Engineering,Beihang University,Beijing 100191,China [2]Beihang Qingdao Microelectronics Research Institute,Beihang University,Qingdao 266000,China [3]National Key Lab of Spintronics,Institute of International Innovation,Beihang University,Hangzhou 311115,China

出　　处：《Science China(Information Sciences)》2024年第6期461-462,共2页中国科学（信息科学）（英文版）

基　　金：financially supported by National Key Research and Development Program(Grant No.2021YFB3201800);Taishan Scholars Program,and International Collaboration Project(Grant No.B16001)。

摘　　要：Angle sensors are widely used in numerous fields such as industry,military,medical care,and the Internet of Things(IoT)[1].Magnetoresistance angle sensors have become a mainstream approach for angle measurement because of their high precision,good stability,low cost,and low power consumption.

关 键 词：ANNEALING IOT ANGLE 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]