Langasite-based SAW high-temperature vibration sensor with temperature decoupling  

作　　者：ZHANG Juan CHENG WenHua WANG Hao ZHANG Lei LI XiangRong MA HongShuai PANG JunQi TAN QiuLin 

机构地区：[1]State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan,030051,China [2]Department of Mechanical Engineering,Taiyuan Institute of Technology,Taiyuan,030008,China

出　　处：《Science China(Technological Sciences)》2024年第6期1946-1956,共11页中国科学（技术科学英文版）

基　　金：supported by the National Natural Science Foundation of China(Grant Nos.U1837209 and 52105594);the Fundamental Research Program of Shanxi Province(Grant No.20210302124274);the Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi(Grant No.2023L361);the Outstanding Young Talents Support Plan of Shanxi Province;the Young Sanjin Scholar Distinguished Professor Plan of Shanxi Province;the Innovative Research Group Project of the National Natural Science Foundation of China(Grant No.51821003);the Shanxi‘1331 Project’Key Subjects Construction。

摘　　要：Monitoring high-temperature vibrations is critical in aerospace engineering,industrial manufacturing,and energy production,where harsh conditions necessitate robust vibration sensors for detecting anomalous signals.However,the accuracy of such sensors is often compromised by crosstalk between temperature and vibration signals.This study introduces a high-temperature vibration sensor based on langasite(LGS)surface acoustic wave(SAW)technology,designed to withstand temperatures up to 500℃.The sensor demonstrates high sensitivity,ranging from 12.54 kHz/g at 25℃ to 15.63 k Hz/g at 500℃.A comprehensive mechanical and electrical coupling model for the SAW vibration sensor was developed by integrating theoretical equations with numerical simulations to optimize the sensor's performance.Additionally,a novel decoupling algorithm for temperature and vibration was established,achieving thermomechanical decoupling with precise vibration parameters.Experimental results indicated a maximum relative deviation of 4.67%for the algorithm.In conclusion,the proposed LGS SAW vibration sensor emerges as a promising solution for the accurate detection of multiple parameters in high-temperature vibration monitoring.

关 键 词：high temperature langasite(LGS) surface acoustic wave(SAW) piezoelectric vibration sensor temperature decoupling 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]