不同等离子气比例对PS-PVD射流及涂层结构影响研究  

Study on Influence of Different Plasma Gas Ratio on PS-PVD Jet and Coating Structure

作　　者：张云杰 邹晗[1,2] 由晓明[1,2] 何箐 赵乾[1,2] ZHANG Yunjie;ZOU Han;YOU Xiaoming;HE Qing;ZHAO Qian(Functional Coating and Equipment Technology Institute,Chinese Academy of Agricultural Mechanization Sciences,Beijing 100083,China;Beijing Jinlunkuntian Special Machine Co.,Ltd.,Beijing 100083,China)

机构地区：[1]中国农业机械化科学研究院功能涂层及装备技术研究所,北京100083 [2]北京金轮坤天特种机械有限公司,北京100083

出　　处：《热喷涂技术》2024年第2期55-64,共10页Thermal Spray Technology

基　　金：航空发动机及燃气轮机基础科学中心项目(P2023-C-Ⅳ-002-001);国家科技重大专项(J2022-Ⅵ-0009-0040)。

摘　　要：等离子物理气相沉积(PS-PVD)一般采用高氦气流量和高喷枪输入功率的工艺,获得具备优异性能的柱状/准柱状结构热障涂层。研究了低氦气流量和低喷枪输入功率条件下,沉积位置对应等离子射流中心的能量变化规律,及对涂层微结构的影响。结果表明:采用适配工艺优化的氧化锆粉体材料,在90 L/min等离子气总流量条件下,Ar/He体积比从1∶2调整至2∶1,氦气流量降低,均能获得准柱状结构涂层。Ar/He体积比1∶1条件下射流能量最高,此时He对等离子射流收束作用减弱,制备涂层的柱状晶厚度降低、柱状晶间冷凝颗粒增多,涂层沉积效率明显降低;总气流量120 L/min,Ar/He体积比2∶1,可获得液相沉积为主的致密涂层结构。结合各元素特征峰的光谱分析结果,ZrⅠ特征峰强度在Ar/He体积比1∶1条件下最高,之后随着Ar/He体积比降低,He对等离子射流气相的约束及对等离子射流的能量场的综合影响决定了涂层微结构特性。Plasma physical vapor deposition(PS-PVD)generally adopts the process of high helium flow rate and high gun input power to obtain the thermal barrier coating with columnar/quasi-columnar structures and excellent performance of column/quasi-column structure.In this study,the energy variation of the deposition position corresponding to the center of the plasma jet and its effect on the microstructure of the coating were studied under the condition of low nitrogen flow rate and low gun input power.The results show that under the condition of 90 L/min plasma gas flow rate,the Ar/He volume ratio is adjusted from 1∶2 to 2∶1,and the helium flow rate is reduced,and the quasi-columnar structure coating can be obtained.Under the condition of Ar/He volume ratio 1∶1,the jet energy is the highest.In this case,the effect of He on the plasma jet beam absorption is weakened,the thickness of the columnar crystals is reduced,the condensation particles between the columnar crystals are increased,and the deposition efficiency of the coating is significantly reduced.When the total gas flow rate is 120 L/min and the Ar/He volume ratio is 2∶1,the dense coating structure dominated by liquid phase deposition can be obtained.Combined with the spectral analysis results of characteristic peaks of each element,the intensity of ZrⅠcharacteristic peak is the highest when Ar/He volume ratio is 1∶1,and then with the decrease of Ar/He volume ratio,the constraint of He on the gas phase of the plasma jet and the comprehensive influence of He on the energy field of the plasma jet determine the microstructure characteristics of the coating.

关 键 词：等离子物理气相沉积 等离子射流特性 光学发射光谱 气体比例 微结构 

分 类 号：TG174.442[金属学及工艺—金属表面处理]