高精度传感器温度漂移补偿分析与研究  

Temperature Drift Compensation Analysis and Research for High-precision Sensors

作　　者：刘明强 沈兆坤 胡洪林 孙辉 黄运川 LIU Ming-qiang;SHEN Zhao-kun;HU Hong-lin;SUN Hui;HUANG Yun-chuan(Guizhou Institute of Electronics Industry;Guizhou Qiantong Engineering Technology Company Limited)

机构地区：[1]贵州省电子工业研究所 [2]贵州黔通工程技术有限公司

出　　处：《化工自动化及仪表》2024年第4期614-620,共7页Control and Instruments in Chemical Industry

基　　金：贵州省科技计划(批准号:黔科合服企〔2023〕002)资助的课题;贵阳市科技计划(批准号:筑科合同〔2023〕8-2)资助的课题。

摘　　要：针对高精度位移传感器的测量精度因受温度影响产生非线性误差,关键技术指标发生较大偏移的问题,对高精度位移传感器的温度漂移补偿进行研究,通过对系统组成和实现原理的分析,设计硬件补偿(电桥电路和补偿电路)和软件补偿(数字滤波、查表法及曲线拟合算法等),对测试数据进行深入分析、研究和建模,有效抑制了温度变化对传感器测量精度的影响,提升了高精度位移传感器的测量精度和线性度。Aiming at the temperature-incurred nonlinear measurement error of the high-precision displacement sensor and the obvious offset in its key technical indicators,the temperature drift compensation for it was studied.Through investigating the system’s composition and realization,designing both hardware(bridge circuit and compensation circuit)and software(digital filtering,look-up table method and curve fitting algorithm,etc.)compensation,as well as analyzing and modeling the test data,the temperature change’s influence on the sensor’s measurement accuracy was suppressed to improve both measurement accuracy and linearity of the high-precision displacement sensor.

关 键 词：位移传感器 温度漂移 数字滤波 查表法 曲线拟合 最小二乘法 

分 类 号：TH822[机械工程—仪器科学与技术]