多足式微型直线超声电机定子的设计与仿真  

Design and simulation of stator for multi legged miniature linear ultrasonic motor

作　　者：王大志[1,2,3] 杨明洛 王奉书 李泽飞 段宇 梁世文 孔令杰 蔡宜如 杨欣龙 张泽田 唐彬 WANG Dazhi;YANG Mingluo;WANG Fengshu;LI Zefei;DUAN Yu;LIANG Shiwen;KONG Lingjie;CAI Yiru;YANG Xinlong;ZHANG Zetian;TANG Bin(School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China;State Key Laboratory of High Performance Precision Manufacturing,Dalian 116024,China;Ningbo Institute of Danlian University of Technology,Ningbo 315000,China;Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China)

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024 [2]高性能精密制造全国重点实验室,辽宁大连116024 [3]大连理工大学宁波研究院,浙江宁波315000 [4]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《光学精密工程》2024年第11期1713-1723,共11页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.62074138);宁波市自然科学基金资助项目(No.2022J008);中央高校基本科研业务费(No.DUT22LAB405,No.UT22QN227);大连理工大学宁波研究院资助项目。

摘　　要：针对小空间、低电压、大驱动力的应用需求,提出了一种基于单弯曲振动模态的多足直线式微型超声电机。根据超声电机的驱动原理对定子结构进行设计,利用有限元软件ANSYS Workbench建立定子的动力学仿真模型,对定子进行结构优化及动力学分析,确定定子最终尺寸为8 mm×1 mm×0.6 mm,定子实测B3,B4模态谐振频率与仿真相比误差分别为6.99%和5.46%。最后,建立电机定、动子之间的非线性仿真接触模型,验证了超声电机双向驱动的可行性。搭建微型直线超声电机驱动性能测试装置。实测结果表明:当驱动电压为60 Vpp时,最大空载速度为53.3 mm/s、最大负载为43.3 mN,推重比达280。该微型超声电机原理可行、结构简单紧凑,具有良好的输出性能,在光学系统、精密定位系统和移动终端等精密驱动领域有着广阔的应用前景。To meet the application requirements of narrow spaces,low voltage,and high driving force,a multi-legged linear miniature ultrasonic motor based on a single bending vibration mode was proposed.Firstly,the stator structure was designed according to the driving principle of the ultrasonic motor.Using the finite element software ANSYS Workbench,a dynamic simulation model of the stator was established,followed by structural optimization and dynamic analysis.The final dimensions of the stator were determined to be 8 mm×1 mm×0.6 mm,with measured resonant frequency errors of 6.99%and 5.46%,respectively.Finally,a nonlinear simulation contact model between the stator and mover of the motor was created to verify the feasibility of the bidirectional drive of the ultrasonic motor.A driving performance test device for the micro linear ultrasonic motor was constructed.The measured results indicated that with a driving voltage of 60 Vpp,the maximum no-load speed was 53.3 mm/s,the maximum load was 43.3 mN,and the thrust-to-weight ratio was 280.Experimental results demonstrate that the micro ultrasonic motor has a viable principle,a simple and compact structure,and good output performance,suggesting broad application prospects in precision drive fields such as optical systems,precision positioning systems,and mobile terminals.

关 键 词：微型超声电机 驻波 动力学仿真 振动特性 

分 类 号：TM382[电气工程—电机] TM359.4