共路移相干涉单像素波前成像用于透镜相位检测  

Phase-Shifting Common-Path Interferometry for Lens Phase Detection via Single-Pixel Detector

作　　者：陶星伏 翟爱平[1] 冀文静 赵文静[1] 王东[1,2] Tao Xingfu;Zhai Aiping;Ji Wenjing;Zhao Wenjing;Wang Dong(College of Electronic Information and Optical Engineering,Taiyuan University of Technology,Taiyuan 030024,Shanxi,China;Key Laboratory of Advanced Transducers and Intelligent Control System,Ministry of Education,Taiyuan University of Technology,Taiyuan 030024,Shanxi,China)

机构地区：[1]太原理工大学电子信息与光学工程学院,山西太原030024 [2]太原理工大学新型传感器与智能控制教育部重点实验室,山西太原030024

出　　处：《光学学报》2024年第9期114-122,共9页Acta Optica Sinica

基　　金：国家自然科学基金(62275188);山西省国际科技合作项目(202104041101009);山西省自然科学基金研究项目(202103021223091,20210302123169)。

摘　　要：传统的透镜相位测量技术很大程度上依赖于二维面阵探测器,其应用范围受限于面阵探测器的性能。单像素波前成像为此提供了一种新途径。本文提出将共路移相干涉单像素波前成像方法用于实际光学透镜的相位测量。以Hadamard基调制目标透镜波前,采用棋盘格参考方式,将空间传输光场分为信号光场和参考光场,构建共路移相干涉,单像素探测器采集相应的光强,由二阶相关方法重建被测透镜的波前信息,进而检测透镜相位。实验结果表明,对于名义焦距为1000 mm的透镜,以128 pixel×128 pixel重建相位图,拟合得到的透镜焦距的平均相对误差仅为0.0298%。该方法具有装置简单、成本低、计算量小等优点。此外,得益于单像素探测器自身优势,有望用于弱光环境,以及极紫外和远红外等特殊波段的透镜或透明物体的波前检测。Objective The traditional 2D detector-based phase measurement methods are always limited by the specific spectral response range,for which single-pixel wavefront imaging provides a new method.A digital micromirror device(DMD)-based single-pixel common-path interference is established,in which Hadamard basis is employed to modulate the target wavefront and the checkerboard partition on the DMD is done to divide the light field into the signal and reference fractions.Meanwhile,phase image formation is implemented as usual with the mathematical principles of single-pixel imaging and phase-shifting algorithms.The results show that with the four-step phase-shifting,the mean relative error of the calculated focal length is as low as 0.0298%when the phase image resolution is 128 pixel×128 pixel for a lens with a nominal focal length of 1000 mm.This method is characterized by a simple device,low cost,and simple calculation principle.Benefiting from the single-pixel detection advantages,this method is expected to be adopted for wavefront detection of lenses or transparent objects in weak light environments,extreme ultraviolet,and far infrared bands.Further,it expands the application scope of single-pixel wavefront imaging.Methods According to the single-pixel wavefront imaging theory,a DMD-based single-pixel multi-step phase-shifting common-path interferometer is established,in which the Hadamard basis is utilized to modulate the target wavefront,and the checkerboard partition on the DMD is done to divide the light field into the signal and reference fractions and form the interference.Then,the lens wavefront can be reconstructed using the passively detected coefficients correlated with the Hadamard modulation patterns.Finally,the phase and amplitude of the physical lens can be obtained from the reconstructed complex wavefront.For the wavefront reconstruction,a four/three-step phase-shifting and down-sampling strategy is performed.Results and Discussions Two lenses with focal lengths of 1000 mm and 500 mm are selected as

关 键 词：单像素波前成像 透镜相位检测 移相干涉 共路干涉 

分 类 号：O439[机械工程—光学工程]