水导激光烧蚀碳化硅仿真与实验研究  

Simulation and Experimental Study of Water Jet-guided Laser Ablation Silicon Carbide

作　　者：王宇迪 乔红超[2,3] 韩冰 张旖诺[2,3,4] 梁金盛 王顺山 陈燕 赵吉宾[2,3] WANG Yudi;QIAO Hongchao;HAN Bing;ZHANG Yinuo;LIANG Jinsheng;WANG Shunshan;CHEN Yan;ZHAO Jibin(School of Mechanical Engineering and Automation,University of Science and Technology Liaoning,Liaoning Anshan 114051,China;State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang 110016,China;Institute for Robotics and Intelligent Manufacturing,Chinese Academy of Sciences,Shenyang 110169,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]辽宁科技大学机械工程与自动化学院,辽宁鞍山114051 [2]中国科学院沈阳自动化研究所机器人学国家重点实验室,沈阳110016 [3]中国科学院机器人与智能制造创新研究院,沈阳110169 [4]中国科学院大学,北京100049

出　　处：《表面技术》2024年第13期164-174,共11页Surface Technology

基　　金：国家重点研发计划(SQ20200YFB4600100)。

摘　　要：目的探究碳化硅水导激光加工烧蚀机理。方法采用实验与仿真相结合的方式对碳化硅烧蚀过程进行研究分析。结果水射流持续冷却作用极大地降低了碳化硅加工过程中的热累积效应,通过烧蚀阈值计算方法得到了多脉冲水导激光烧蚀碳化硅功率阈值(约为0.1565 W),烧蚀阈值基本不随脉冲数的改变而发生波动。通过对碳化硅刻蚀形貌进行分析发现,烧蚀宽度随着脉冲数整体在3.1~4.1μm之间波动,基本不受脉冲数的影响,烧蚀深度随着脉冲数的增加而增大,但随着烧蚀深度的增加,水导激光烧蚀能力逐渐被削弱,适当增加激光功率可以抑制水导激光烧蚀能力减弱的趋势,通过较大的激光功率更易加工出深宽比较大的沟槽。确定了碳化硅烧蚀功率与烧蚀直径之间的等量关系,通过激光功率能够合理预测烧蚀宽度,经与实验结果进行对比发现较符合,这也间接说明脉冲数对于水导激光烧蚀直径不是主要影响因素。碳化硅水导激光刻蚀截面呈现倒梯形,由于水射流冲刷作用的存在,重凝物质无法富集在材料表面,使得SiC烧蚀表面与未烧蚀区域之间过渡较为平滑,沟槽侧壁带状条纹特征也证实了水射流冲刷作用的存在。结论水射流冷却及冲刷作用的存在,使得水导激光在加工硬脆性材料具有独特的优势,能够实现对硬脆性材料的无裂纹及无热影响区加工。Silicon carbide(SiC)ceramics at room temperature or at high temperature can show excellent mechanical properties,such as thermal stability,corrosion resistance,oxidation resistance and high hardness,so it is currently known that the ceramic material has the best high temperature mechanical properties.When compared with electrical discharge machining,electrochemical machining and laser machining,water jet-guided laser offers higher precision and lower thermal damage.As the ablation behavior of water-jet guided laser is complicated,it is necessary to explore the ablation mechanism of SiC water jet-guided laser processing.In this study,the ablation process of SiC water jet-guided laser machining was studied by experiment and simulation,and the ablation threshold,ablation morphology and ablation quality of SiC were investigated and analyzed.The relationship between the ablation power and the ablation diameter of SiC water jet-guided laser machining was obtained.In addition,appropriate increase of laser power could improve the ablation efficiency of the materials,and the SiC ablation quality was the best when the ablation area was close to the laser irradiation area.Non-pressure sintered SiC with a thickness of 1 mm was used as the target material for water jet-guided laser ablation.Single channel groove ablation and drilling were used.The same parameters as used in the experiment were used to simulate the SiC ablation process.The 3D surface morphology of SiC was measured by Bruker Contour GT-K optical microscope,and the SiC multi-pulse ablation threshold under different equivalent pulse numbers was calculated.The relationship between ablation width and ablation depth and laser power and pulse number was obtained,and the effect of laser power on the ablation quality of water jet-guided laser was further revealed.In this study,the ablation threshold of SiC by multi-pulse water jet-guided laser was basically not affected by the number of pulses.The continuous heat transfer of water jet took away the residual heat genera

关 键 词：水导激光加工 烧蚀机理 实验与仿真 烧蚀功率阈值 烧蚀形貌 

分 类 号：TH16[机械工程—机械制造及自动化]