表面具有穹顶结构的PVDF柔性压力传感器的制备与性能分析  

Analysis of Preparation and Performance for PVDF Flexible Pressure Sensors with Dome Structure on the Surface

作　　者：王广阔 杨子星 胡志军 WANG GuangKuo;YANG Zixing;HU Zhijun(Key Laboratory of Advanced Optical Manufacturing Technology in Jiangsu,School of Optoelectronic Science and Engineering,Suzhou University,Jiangsu 215006,China)

机构地区：[1]江苏省先进光学制造技术重点实验室,苏州大学光电科学与工程学院,江苏215006

出　　处：《电子技术（上海）》2024年第4期19-21,共3页Electronic Technology

基　　金：国家自然科学基金资助项目(51973150)。

摘　　要：阐述聚偏氟乙烯(PVDF)具有良好的压电性和柔韧性,是制备柔性压力传感器的重要材料之一。但由于残余应力和热释电效应的存在,利用传统方法制备的PVDF基柔性压力传感器不仅工艺复杂,而且温度稳定性比较差。为此,提出利用挠曲电效应制备一种PVDF基柔性压力传感器,通过在PVDF薄膜的表面构筑穹顶型微米结构,实现挠曲电效应。传感器的有效压电电荷系数和电压系数分别达到-12.1pC/N和114mV·m/N,在室温到170℃的温度范围内表现出良好的热稳定性。This paper describes that polyvinylidene fluoride(PVDF) has good piezoelectricity and flexibility,and is one of the important materials for the preparation of flexible pressure sensors.However,due to the residual stress and pyroelectric effect,the PVDF-based flexible pressure sensors prepared by using traditional methods are not only complicated in process,but also have poor temperature stability.In order to solve these problems,a PVDF-based flexible pressure sensor is prepared in this paper using the flexoelectric effect,which is realized by constructing a dome type micron structure on the surface of the PVDF film.The effective piezoelectric charge coefficient and voltage coefficient of the sensor reach-12.1pC/N and 114mV·m/N,respectively,and exhibit good thermal stability in the temperature range from room temperature to 170 ℃.

关 键 词：微纳米图案化 挠曲电效应 热稳定性 压力传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]