半导体可饱和吸收镜锁模激光器研究进展  

Progress in Semiconductor Saturable Absorption Mirror Mode-Locked Laser

作　　者：黄婷 林楠[1] 张秋月 何天将 熊聪[1] 仲莉[1,2] 刘素平 马骁宇[1,2] Huang Ting;Lin Nan;Zhang Qiuyue;He Tianjiang;Xiong Cong;Zhong Li;Liu Suping;Ma Xiaoyu(National Engineering Research Center for Optoelectronic Devices,Institute of Semiconductor,Chinese Academy of Science,Beijing 100083,China;College of Materials Science and OptoElectronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所光电子器件国家工程研究中心,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《激光与光电子学进展》2024年第9期89-101,共13页Laser & Optoelectronics Progress

摘　　要：半导体可饱和吸收镜(SESAM)作为超快激光技术中最常用的被动锁模器件,由于可自启动、插入损耗小、集成度高和设计灵活等优点,具有广泛的应用范围和极佳的商业前景。本文主要介绍SESAM的锁模原理和发展现状,对目前SESAM的外延结构、生长方式和参数性能进行总结归纳,详尽描述其在固体激光器、半导体激光器和光纤激光器的锁模最新进展,并指出各类锁模激光器的性能特点和未来发展方向。Semiconductor saturable absorption mirror(SESAM)is the most commonlyused passive modelocking device in ultrafast laser technology.Owing to its advantages of selfstarting,low insertion loss,high integration,and flexible design,SESAM has a wide range of applications and excellent commercial prospects.This study introduces the modelocking principle and current development status of SESAM and summarizes the current epitaxial structure,growth mode,and parameter performance of SESAM.It also provides a detailed description of its latest progress in modelocking in solidstate,semiconductor,and fiber lasers.Moreover,the performance characteristics and futuredevelopment direction of various types of modelocked lasers are presented.

关 键 词：半导体可饱和吸收镜 被动锁模 激光器 超快激光 

分 类 号：TN248[电子电信—物理电子学]