用于双极化T/R组件的X~Ku波段MEMS环行隔离组件的设计  

Design of X-Ku-Band MEMS Circular and Isolation Components for Dual-Polarized T/R Module

作　　者：周嘉 汪蔚 高纬钊 Zhou Jia;Wang Wei;Gao Weizhao(Hebei Meitai Electronic Technology Co.,Ltd.,Shijiazhuang 050200,China;The 13^(th)Research Institute,CETC,Shijiazhuang 050051,China)

机构地区：[1]河北美泰电子科技有限公司,石家庄050200 [2]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2024年第7期93-97,共5页Micronanoelectronic Technology

摘　　要：多极化合成孔径雷达(SAR)能够提供丰富的目标特性,增强目标的识别、分类和抗干扰能力,成为重要的发展方向。其关键组件T/R组件采用了发射分时、接收同时的模式,每个通道射频(RF)前端包含一路发射通路和两路接收通路。利用微电子机械系统(MEMS)技术设计了一款X~Ku波段环行隔离组件,在实现射频前端小型化双接收通路集成的同时解决了两路通道隔离问题。该环行隔离组件工作频率为10~18 GHz,尺寸为6 mm×11 mm×2.5 mm,三端口回波损耗均≥16 dB,并且双接收通路的隔离度≥29 dB。The multipolarization synthetic aperture radar(SAR)can provide rich target characteristics,enhance the abilities of target recognition,classification and anti-interference,and become an important development direction.The key component T/R module adopted the mode of transmitting time-sharing and receiving simultaneously,and the radio frequency(RF)front end of each channel contained one transmitting channel and two receiving channels.An XKu-band circular and isolation components were designed by using micro-electromechanical system(MEMS)technology,which solved the problem of two-channel isolation while realizing the miniaturized dual-channel integration in RF front end.The operating frequency of circular and isolation components is 10-18 GHz,the size is 6 mm×11 mm×2.5 mm,three-port return loss is≥16 dB,and the dual receiving path isolation is≥29 dB.

关 键 词：微电子机械系统(MEMS) 双极化 环行器 隔离器 共轭匹配 X~Ku波段 

分 类 号：TN621[电子电信—电路与系统] TH703[机械工程—仪器科学与技术]