一种用于压力传感器的温度补偿电路的设计与实验  

Design and Experiment of Temperature Compensation Circuit for Pressure Sensors

作　　者：田传升 王俊强 Tian Chuansheng;Wang Junqiang(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,太原030051 [2]中北大学前沿交叉科学研究院,太原030051

出　　处：《微纳电子技术》2024年第7期98-104,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(62374152)。

摘　　要：由于压力传感器在高温、高压下力热耦合影响压力测量的准确性,急需对传感器进行温度补偿,通过一种基于惠斯通电桥的温度补偿电路设计,选择恒流源200μA作为激励,利用温度对恒流1/4桥中温度补偿单元造成的阻值变化得到单一的温度参量,利用温度、压力对恒流半桥中力敏单元造成的阻值变化得到温度-压力耦合参量,最后经过数据处理对传感器电性能进行温度补偿,排除温度对压力测试的干扰,实现高精度压力测量。同时,采用仿真及实验进行不同温度下压力的测量,通过AD620放大电路将采集所得电压信号放大100倍,验证该传感器温度补偿设计的合理性。结果表明在恒流源200μA、初始电阻3000Ω、温度25~1225℃范围内,仿真满量程最大误差为0.08%。实测情况下在25~525℃范围内满量程误差<1%,而在25~1225℃范围内满量程误差最大为5.7%。该补偿方法较为简单,补偿效果在25~525℃范围内良好,具有较好的应用前景。Due to the accuracy of pressure measurement affected by the force thermal coupling of the pressure sensor in the high temperature and high pressure,there is an urgent need for temperature compensation of the sensor.Through a kind of temperature compensation circuit design based on the Wheatstone bridge,a constant current source of 200μA was chosen as the excitation,and a single temperature parameter was obtained by the resistance change caused by the temperature on the temperature compensation unit in the constant current 1/4 bridge.The temperature-pressure coupling parameter was obtained by the resistance change caused by the temperature and pressure on the force sensitive unit in the constant current half bridge,and finally temperature compensation was carried out for electrical performance of the sensor by data processing to exclude the interference of temperature on the pressure test and achieve highprecision pressure measurement.Meanwhile,the pressure measurement at different temperatures was carried out by simulation and experiment,and the collected voltage signal was amplified 100 times by the AD620 amplification circuit to verify the reasonableness of the temperature compensation design of the sensor.The results show that at the constant current source of 200μA,initial resistance of 3000Ω,the temperature range of 25-1225℃,the maximum error of the full-scale of the simulation is 0.08%.The full-scale error is less than 1%in the range of 25-525℃,while the maximum full-scale error is 5.7%in the range of 25-1225℃in actual test.The compensation method is simple,and the compensation effect is good in the range of 25-525℃,which has a good application prospect.

关 键 词：传感器 高精度 温度补偿 惠斯通电桥 压力测量 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH823[自动化与计算机技术—控制科学与工程]