High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer  

作　　者：YISI DONG WENWEN LI JiNRAN ZHANG WENRUI LUo HAIJIN FU XU XING PENGCHENG HU YONGKANG DONG JIUBIN TAN 

机构地区：[1]Center of Ultra-precision Optoelectronic Instrument,Harbin Institute of Technology,Harbin 150080,China [2]Key Laboratory of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology),Ministry of Industry and Information Technology,Harbin 150080,China [3]National Key Laboratory of Science and Technology on Tunable Laser,Harbin Institute of Technology,Harbin 150001,China

出　　处：《Photonics Research》2024年第5期921-931,共11页光子学研究（英文版）

基　　金：National Key Research and Development Program of China(2022YFF0705802);Natural Science Foundation of Heilongjiang Province(LH2019E048);China Postdoctoral Science Foundation(2023M730883);National Postdoctoral Program for Innovative Talents(BX20230478)。

摘　　要：As the key of embedded displacement measurement,a fiber-optic micro-probe laser interferometer(FMI)is of great interest in developing high-end equipment as well as precision metrology.However,conventional phasegenerated carrier(PGC)approaches are for low-speed scenes and local error analysis,usually neglecting the global precision analysis and dynamic effect of system parameters under high-speed measurement,thus hindering their broad applications.We present a high-speed PGC demodulation model and method to achieve subnanometer displacement measurement precision in FMI.This model includes a global equivalent resolution analysis and revelation of the demodulation error mechanism.Utilizing this model,the failure issues regarding the PGC demodulation method under high speed and large range are addressed.Furthermore,an ultra-precision PGC demodulation algorithm based on the combination of static and dynamic delay adaptive regulation is proposed to enable high-speed and large-range displacement measurement.In this paper,the proposed model and algorithm are validated through simulation and experimental tests.The results demonstrate a displacement resolution of 0.1 nm with a standard deviation of less than 0.5 nm when measuring at a high velocity of 1.5 m/s—nearly a tenfold increase of the latest study.

关 键 词：INTERFEROMETER FIBER DISPLACEMENT 

分 类 号：TH744.3[机械工程—光学工程]