大口径激光发射窗口镜多点支撑下结构研究  

Study on the Structure of Large Aperture Laser Transmitting Window Mirror with Multi Support

作　　者：时英钟 邵帅[1] 邵明振[1] SHI Ying-zhong;SHAO Shuai;SHAO Ming-zhen(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Jilin Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100039,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100039

出　　处：《机械设计与制造》2024年第7期145-150,共6页Machinery Design & Manufacture

摘　　要：大口径激光发射窗口窗口镜由于径厚比高,刚度低,在自身重力下会发生变形,即镜面峰谷值(PV值)与均方根值(RMS)值过大,窗口镜会形成透镜,改变了激光发射输出端的发散角,不能满足激光发射系统的精准命中和能量集中的需求。建立了硒化锌材料的光学窗口的有限元仿真模型,计算分析在窗口镜径向支撑与底部安装支撑点结合轴向支撑作用时窗口镜的变形情况,并优化支撑体的材料、数量、位置分布。进行有限元仿真分析后,窗口镜面形精度满足PV值λ≤632.8nm与RMS低于λ/5≤126.56nm,支撑结构设计满足激光发射窗口需求。Due to the high ratio of diameter to thickness and low stiffness,the window mirror of large aperture laser transmitting window will deform under its own gravity,that is,the peak valley value(PV)and root mean square value(RMS)of the mirror are too large,the window mirror will form a lens,which changes the divergence angle of the laser transmitting output end,and can not meet the requirements of accurate hit and energy concentration of the laser transmitting system.In this paper,the finite element simulation model of ZnSe optical window is established.The deformation of the window mirror is calculated and analyzed when the radial support and the bottom mounting support point are combined with the axial support,and the material,quantity and position distribution of the support body are optimized.After the finite element simulation,the accuracy of window mirror shape meets the PV valueλ≤632.8nm and RMS lower thanλ/5≤126.56nm,and the support structure design meets the requirements of laser emission window.

关 键 词：面型精度 有限元仿真 重力变形 支撑结构 大口径光学系统 

分 类 号：TH16[机械工程—机械制造及自动化]