基于介质加载型表面等离激元的微环热光开关  

Design of Surface Plasmon Thermo-Optic Switch Based on Dielectric Loading

作　　者：姚飞 秦志斌 肖经[2] 韦启钦 YAO Fei;QIN Zhi-bin;XIAO Jing;WEI Qi-qin(Guilin G-Link Technology Co.,Ltd.,Guilin 541004,China;Guilin University of Electronic Technology,School of Mechanical and Electrical Engineering,Guilin 541004,China)

机构地区：[1]桂林聚联科技有限公司,广西桂林541004 [2]桂林电子科技大学机电工程学院,广西桂林541004

出　　处：《光学与光电技术》2024年第3期78-83,共6页Optics & Optoelectronic Technology

基　　金：国家自然科学基金(62164004);广西壮族自治区创新驱动发展专项(桂科计字[2022]68号)资助项目。

摘　　要：虽然现有热光开关能够实现较低的功耗或者较快的响应时间,但是光开关普遍尺寸较大或结构较为复杂,在实际应用中受到较大限制。为了实现结构紧凑,响应时间短的热光开关,基于介质加载型表面等离激元微环谐振器提出了一种结构紧凑,响应快速的热光开关。该介质加载型表面等离激元微环由多层材料结构组成,自下而上的结构为PMMA层、Au层、SiO_(2)层以及Si层。Au层不仅可用作激发表面等离激元的材料,还可作为加热器。采用有限元方法对该热光开关的光学传输模式,温度分布等性能进行研究分析;为了验证该热光开关的动态特性,在波长为1 530~1 570 nm条件下,采用光-热多物理场耦合分析方法对该微环热光开关的光信号传输影响频谱以及响应时间等动态特性进行分析研究。研究结果表明,该微环热光开关具有快速的响应速度和低加热功率,上升时间和下降时间分别为2.5μs和6.8μs。此外,该微环热光开关的插入损耗为0.13 dB。提出的基于介质加载型表面等离激元不仅能够兼容传统半导体制备工艺,还具有优异的动态性能,在光电集成电路中具有较好的应用潜力。Although existing thermo-optic switches offer advantages such as lower power consumption and faster response times,their larger size and complex structures often limit their practical applications.To address this limitation,a novel compact and fast-response thermo-optic switch is proposed in this study.The switch is based on a dielectric-loaded surface plasmon microring resonator,which consists of a multi-layer material structure including PMMA,Au,SiO_(2),and Si layers.The Au layer serves both as a material for exciting surface plasmons and as a heater.Using finite element method analysis,the optical transmission mode,temperature distribution,and other properties of the thermo-optic switch were studied.Additionally,a photo-thermal multiphysics field coupling analysis method was employed to investigate the dynamic characteristics of the switch,such as the impact of optical signal transmission on the spectrum and response time of the microring thermo-optical switch,within the wavelength range of 1530 nm to 1570 nm.The research findings demonstrate that the microring thermo-optic switch exhibits a fast response speed and low heating power,with a rise time of 2.5μs,a fall time of 6.8μs,and an insertion loss of 0.13 dB.Moreover,the dielectric-loaded surface plasmons proposed in this study are compatible with traditional semiconductor manufacturing processes and exhibit excellent dynamic performance.Hence,this switch holds promising potential for optoelectronic integrated circuit applications.

关 键 词：热光开关 微环谐振器 介质加载型波导 热光效应 光电器件 硅基光子学 

分 类 号：TN491[电子电信—微电子学与固体电子学]