一种谐振微加速度计频率测量及稳定度分析  

Frequency Measurement and Stability Analysis of Resonant Micro-accelerometer

作　　者：宋金鑫 刘恒[1] 吴嘉乐 陈逸楠 孙婉璐 SONG Jinxin;LIU Heng;WU Jiale;CHEN Yinan;SUN Wanlu(School of Electronics&Information Engineering,Nanjing University of Information Science&Technology;Faculty of Data Science,City University of Macao,China)

机构地区：[1]南京信息工程大学电子与信息工程学院 [2]澳门城市大学数据科学学院,中国澳门

出　　处：《仪表技术与传感器》2024年第6期13-18,44,共7页Instrument Technique and Sensor

基　　金：国家重点研发计划项目(2019YFC1804704);江苏省研究生实践创新计划项目(SJCX23_0375)。

摘　　要：针对谐振式微加速度计的高精度频率测量和长时间频率稳定度的快速分析需求问题,文中在总结Allan方差和原始#1理论方差的基础上,介绍了一种快速#1理论方差。实验测试表明:在不同采样间隔下快速#1理论方差的精度和响应速度都优于Allan方差和原始#1理论方差,而且采样间隔越小,越能提升谐振频率的稳定度分析。针对研制的谐振式微加速度计选择采样间隔为1 s,快速#1理论方差分析方法能在1 s内完成1 h频率稳定度分析,有利于高精度微机械谐振加速度传感器研制。To meet the requirements of high-precision frequency measurement and fast analysis of long-term frequency stability for the micromechanical resonant accelerometer,a fast theoretical variance#1 was introduced based on the summary of Allan variance and original#1 theoretical variance.The experimental results show that fast#1 theoretical variance has good accuracy and can run quickly under different sampling intervals,and is superior to Allan variance and original theoretical variance#1.The smaller the sampling interval is,the better the stability analysis of resonance frequency is.For the resonant micro-accelerometer developed,the fast theoretical variance#1analysis method can complete the frequency stability analysis for 1 hour within 1 second,which provides the basis for the development of high precision micromechanical resonant acceleration sensor.

关 键 词：谐振式微加速度计 频率稳定度 ALLAN方差 #1理论方差 

分 类 号：TH71[机械工程—测试计量技术及仪器]