氮化铝陶瓷微波窗片的钎焊封接与极高频(EHF)下透波性能研究  

Brazing Sealing and Extreme High Frequency(EHF)Wave Transmittance of Aluminum Nitride Ceramic Microwave Window

作　　者：付勇敢 蒋友福 张昕飞 林盼盼 芦伟 汪卫华 FU Yonggan;JIANG Youfu;ZHANG Xinfei;LIN Panpan;LU Wei;WANG Weihua(Institutes of Physical Science and Information Technology,Anhui University,Hefei 230000,Anhui,China;School of Materials Science and Engineering,Harbin University of Technology,Harbin 150000,Heilongjiang,China)

机构地区：[1]安徽大学物质科学与信息技术研究院,安徽合肥230000 [2]哈尔滨工业大学材料科学与工程学院,黑龙江哈尔滨150000

出　　处：《陶瓷学报》2024年第3期525-531,共7页Journal of Ceramics

基　　金：国家磁约束核聚变能发展研究专项(2019YFE03100100,2022YFE03080001)。

摘　　要：AlN陶瓷常用作高功率微波窗材料,为了实现AlN陶瓷与铜基底的有效连接,选用自行配置的Ag-28Cu-3Ti三元活性钎料进行钎焊实验,并且对钎焊后的样品进行无损检测、气密性检测、微观形貌表征、介电性能表征以及力学性能表征。结果表明,焊接样品无明显虚焊、裂纹、气泡等,氦漏率为3.76×10^(–8)Pa·m^(3)·s^(−1);微观表征显示钎焊接头界面组成为AlN/TiN/CuTi/Cu+Ag/Cu,且发现了Ti元素的局部偏析。钎焊后,微波窗的介电性能和介电损耗均满足要求,综合介电损耗和驻波系数的测试结果,其最佳使用频率为98.8 GHz~108.0 GHz。并且AlN封接件平均抗剪切强度为185.7 MPa,满足强度要求。AlN ceramics are commonly used as high-power microwave window materials.In order to achieve effective connection between AlN ceramics and copper substrates,a self-configured Ag-28Cu-3Ti ternary active brazing filler metal was selected for brazing experiments.The brazed samples were subjected to characterizations,including nondestructive testing,gas tightness,microstructure,dielectric property and mechanical strength.It is showed the brazed samples had no obvious solder joint defects,cracks,bubbles and so on,with a helium leakage rate of 3.76×10^(–8)Pa·m^(3)·s^(−1).The interface composition of the brazed joint was AlN/TiN/CuTi/Cu+Ag/Cu,while local segregation of Ti was observed.After brazing,the dielectric properties met the requirements for applications.According to dielectric loss and standing wave factor,optimal operating frequency range of the devices was 98.8–108.0 GHz.Average shear strength of the AlN sealing piece was 185.7 MPa,which met the strength requirements.

关 键 词：钎焊密封 AlN 驻波系数 介质损耗 准光腔 

分 类 号：TQ174.75[化学工程—陶瓷工业]