Nanodiamond/Ti_(3)C_(2) MXene-coated quartz crystal microbalance humidity sensor with high sensitivity and high quality factor  

作　　者：Yao Yao Qiao Chen Yan-Qi Li Xian-He Huang Wei-Wei Ling Zhe-MiaoXie Jia-QiWang Chang-Ming Chen 

机构地区：[1]College of Communication Engineering,Chengdu University of Information Technology,Chengdu 610225,China [2]School of Automation,Chongqing University of Posts and Telecommunications,Chongqing 400065,China [3]School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China [4]Advanced Micro-/Nano-Devices Lab,Department of Systems Design Engineering,University of Waterloo,Waterloo,ON N2L 3Gl,Canada

出　　处：《Rare Metals》2024年第6期2719-2729,共11页稀有金属（英文版）

基　　金：financially supported by the Project funded by the National Natural Science Foundation of China(No.61401047);the China Postdoctoral Science Foundation(No.2018M633349);the Oversea Students Funding Project of the Department of Human Resources and Social Security of Sichuan;the Scientific Research Foundation of CUIT(No.KYQN202210)。

摘　　要：To address the challenge of achieving both high sensitivity and a high quality factor in quartz crystal microbalance(QCM)humidity sensors,a nanodiamond(ND)/Ti_(3)C_(2)MXene composite-coated QCM humidity sensor was fabricated.The material characteristics of ND,Ti_(3)C_(2)MXene,and ND/Ti_(3)C_(2)MXene composite were analyzed by transmission electron microscopy(TEM)and Fourier transform infrared(FTIR)spectroscopy.The experimental results demonstrated that the hydrophilic ND nanoparticles coated on Ti_(3)C_(2) MXene nanosheet prevented the self-stacking of Ti_(3)C_(2)MXene and enhanced the sensitivity of Ti_(3)C_(2) MXene-based QCM humidity sensor.Moreover,the high mechanical modulus of Ti_(3)C_(2) MXene material helped ND/Ti_(3)C_(2)MXene composite-coated QCM humidity sensor to achieve a high quality factor(>20,000).ND/Ti_(3)C_(2)MXene compositecoated QCM humidity sensor exhibited a sensitivity of 82.45 Hz/%RH,a humidity hysteresis of 1.1%RH,fast response/recovery times,acceptable repeatability,and good stability from 11.3%RH to 97.3%RH.The response mechanism of ND/Ti_(3)C_(2) MXene composite-coated QCM humidity sensor was analyzed in combination with a bi-exponential kinetic adsorption model.Finally,the potential application of ND/Ti_(3)C_(2)MXene composite-coated QCM humidity sensor was demonstrated through its frequency response to wooden blocks with different moisture contents.

关 键 词：Humidity sensor Quartz crystal microbalance NANODIAMOND Ti_(3)C_(2)MXene High quality factor 

分 类 号：TH715.11[机械工程—测试计量技术及仪器] TP212[机械工程—仪器科学与技术]