面向微光学元件表面形貌测量的涡旋相移数字全息技术  

Vortex phase-shifting digital holography for micro-optical element surface topography measurment

作　　者：薛一梦 刘丙才[1,2] 潘永强[1,2] 房鑫萌 田爱玲[1,2] 张瑞轩 XUE Yi-meng;LIU Bing-cai;PAN Yong-qiang;FANG Xin-meng;TIAN Ai-ling;ZHANG Rui-xuan(School of Opto-Electronic Engineering,Xi’an Technological University,Xi’an 710021,China;Shaanxi Province Key Laboratory of Thin Film Technology and Optical Testing,Xi’an Technological University,Xi’an 710021,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710021 [2]西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西西安710021

出　　处：《中国光学（中英文）》2024年第4期852-861,共10页Chinese Optics

基　　金：陕西省科技厅项目(No.2023KXJ-066);陕西省教育厅项目(No.23JY034);陕西省自然科学基础研究计划项目(NO.2024JC-YBMS-523)。

摘　　要：非接触、无损害的相移数字全息技术对微光学元件检测具有独特优势。因传统的相移数字全息技术需要对相移器进行精细控制和繁琐校准,同时其光路易受到机械振动干扰,导致全息再现像的质量降低。本文借助涡旋光特殊的相位分布,提出了一种基于涡旋相移数字全息的微光学元件表面形貌测量方法。该方法利用螺旋相位板调制涡旋相位,引入高精度相移。基于构建的涡旋相移数字全息显微实验装置,采用干涉极值法确定了相移干涉图之间的真实相移量,并对螺旋相位板的旋转角度与相移量的关系进行标定,实验验证了涡旋相移的可行性;对微透镜阵列进行了重复测量实验,将测试结果与ZYGO白光干涉仪的测试结果进行比较。结果表明:测量得到单个微透镜的平均纵向矢高为12.897μm,平均相对误差为0.155%。所提方法可以实现对被测微光学元件表面形貌的高精度测量,具有易操作、稳定可靠、准确性高等优点。Non-destructive,non-contact phase-shifting digital holography technology has distinct advantages in identifying micro-optical components.As traditional phase-shifting digital holography technology re-quires fine control and cumbersome calibration of the phase shifter,furthermore,its optical path is suscept-ible to mechanical vibration interference,which reduces the quality of the holographically reproduced image.To solve the above problems,we propose a vortex phase-shifting digital holography for the micro-optical ele-ment surface measurement with the help of the special phase distribution of vortex light.The method utilizes a helical phase plate to modulate the vortex phase and introduce a high-precision phase shift.Based on the constructed vortex phase-shifting digital holographic microscopy experimental setup,the actual phase shifts between phase-shift interferograms were determined using the interferometric polarity method,the relation-ship between the rotation angle of the helical phase plate and the phase shift was calibrated,and the feasibil-ity of the vortex phase shift was experimentally verified.Repeated measurement experiments were carried out on the micro-lens arrays,and the measurement results were compared with those of the ZYGO white light interferometer.The results indicate that a single micro-lens's average longitudinal vector height is 12.897μm with an average relative error of 0.155%.The proposed method enables highly precise measurement of the surface topography of micro-optical elements.It offers the advantages of easy operation,high stability,and high accuracy.

关 键 词：涡旋相移 数字全息显微 螺旋相位板 相位重建 

分 类 号：O438.1[机械工程—光学工程]