大抽速、高容积KDCP—16低温泵研制  

Development of KDCP-16 Cryopump with Large Pumping Speed and High Capacity

作　　者：卢政阳 管承红 杨晨 陈杰 李艳峰 董文庆 LU Zheng-yang;GUAN Cheng-hong;YANG Chen;CHEN Jie;LI Yan-feng;DONG Wen-qing(CSIC Pride Cryogenic Technology Co.,Ltd.,Nanjing 211100,China)

机构地区：[1]中船鹏力(南京)超低温技术有限公司,江苏南京211100

出　　处：《真空》2024年第4期42-46,共5页Vacuum

基　　金：国家重点研发计划(2023YFF0721300)。

摘　　要：介绍了中船鹏力(南京)超低温技术有限公司自主研制的大抽速、高容积KDCP-16低温泵,对其抽速和热负荷进行了理论计算,并测试了其主要性能指标(抽速、降温时间、抽气容积、渡越容量)。结果表明,KDCP-16低温泵N2抽速为6550 L/s,Ar抽速为5650 L/s,降温时间为110 min,Ar抽气容积为7550 std·L,渡越容量为6.7×10^(4)Pa·L,各项性能指标均优于国外同尺寸低温泵。The large pumping speed and high capacity KDCP-16 cryopump independently developed by CSIC Pride Cryogenic Technology Co.,Ltd.is introduced.The pumping speed and thermal load of the cryopump are theoretically calculated.The test methods of the main performance indexes(pumping speed,cool down time,gas capacity,crossover value)of KDCP-16 cryopump are introduced.The results show that the N2 pumping speed of KDCP-16 cryopump is 6550 L/s,the Ar pumping speed is 5650 L/s,the cooling time is 110 minutes,the Ar gas capacity is 7550 std·L,and the crossover value is 6.7×10^(4)Pa·L.The performance index of KDCP-16 cryopump is better than that of foreign cryogenic pumps of the same size.

关 键 词：低温泵 抽速 降温时间 抽气容积 渡越容量 

分 类 号：TB752[一般工业技术—真空技术]