光子晶体Micro LED微显示阵列加工及光学特性分析  

Fabrication and Optical Characteristics Analysis of Photonic Crystal Micro LED Micro-Display Array

作　　者：孟媛 肖秧 冯晓雨 何龙振 张鹏喆 宁平凡[1] 刘宏伟[1,2] Meng Yuan;Xiao Yang;Feng Xiaoyu;He Longzhen;Zhang Pengzhe;Ning Pingfan;Liu Hongwei(School of Electronics and Information Engineering,Tiangong University,Tianjin 300387,China;Tianjin Key Laboratory of Optoelectronic Detection Technology and System,Tiangong University,Tianjin 300387,China)

机构地区：[1]天津工业大学电子与信息工程学院,天津300387 [2]天津工业大学天津市光电检测技术与系统重点实验室,天津300387

出　　处：《半导体技术》2024年第8期719-725,共7页Semiconductor Technology

基　　金：天津市科技局资助项目(23YDTPJC00370);天津市光电检测技术与系统重点实验室资助项目(2023LOTDS003)。

摘　　要：Micro LED器件具有高亮度、低功耗和高可靠性等优点,但Micro LED显示像素巨量转移和光提取效率低的问题为其应用带来挑战。开发了具有高转移效率和出光效率的单片64×64 Micro LED微显示阵列,提出了倒装型GaN基单片Micro LED微显示阵列芯片和Si基驱动电路的设计方法及集成工艺。通过时域有限差分(FDTD)方法对Micro LED微显示阵列光学特性进行了建模分析,设计了一种提高Micro LED微显示阵列出光效率的光提取结构。结合仿真结果,开发了一种在Micro LED蓝宝石衬底表面制备光子晶体结构的聚焦离子束(FIB)微纳加工工艺,并进行了器件加工。测试结果表明,蓝宝石衬底上加工的光子晶体结构可以提高Micro LED器件的表面出光效率,光功率平均值提升了16.36%,对Micro LED微显示阵列加工及微显示像素光提取问题具有借鉴意义。Micro LEDs have the advantages of high brightness,low power consumption and high reliability.However,the mass transfer and low light extraction efficiency issues in Micro LED display pixels pose challenges for their application.A 64x64 Micro LED micro-display array with high transfer efficiency and light extraction efficiency was developed.The design method and integration process of flip GaN-based monolithic Micro LED micro-display array chip and Si-based drive circuit were proposed.The optical characteristics of the Micro LED micro-display array were modeled and analyzed by finitedifference time-domain(FDTD)method.And a light extraction structure was designed to improve the light extraction efficiency of the Micro LED micro-display array.Combined with the simulation results,the focused ion beam(FIB)micro-nanofabrication process for the fabrication of photonic crystal structures on the surface of the Micro LED sapphire substrate was developed,and devices were fabricated.The test results show that the photonic crystal structure fabricated on the sapphire substrate can improve the surface light extraction efficiency of Micro LEDs,and the average value of luminous power is improved by 16.36%,providing reference for the Micro LED micro-display array fabrication and light extraction problems of micro-display pixels.

关 键 词：Micro LED 微显示阵列 光子晶体结构 聚焦离子束(FIB) 出光效率 

分 类 号：TN312.8[电子电信—物理电子学]