旋涂工艺对钛酸铋(Bi_(4)Ti_(3)O_(12))薄膜铁电性能的影响  

Effect of Spin-coatingon Ferroelectricity of Bismuth Titanate(Bi_(4)Ti_(3)O_(12))Films

作　　者：石敏[1] 陈浩 杜淑淑 陈武 许育东[1] SHI Min;CHEN Hao;DU Shu-shu;CHEN Wu;XU Yu-dong(Schoolof Materials Science and Engineering,Hefei University of Technology,Anhui Hefei 230009,China)

机构地区：[1]合肥工业大学材料科学与工程学院,安徽合肥230009

出　　处：《广州化工》2024年第10期48-51,共4页GuangZhou Chemical Industry

基　　金：安徽省研究生教育教学改革研究项目(No:2022jyjxggyj060);安徽省实践教育基地项目(No:2021xqhzsjjd058);合肥工业大学研究生教学改革研究重点项目(No:2021YJG005)。

摘　　要：应用溶胶-凝胶法,在Pt(111)/Ti/SiO_(2)/Si衬底采用不同转速制备了Bi_(4)Ti_(3)O_(12)薄膜。通过XRD、SEM、半导体测试、铁电性能测试等对制备的薄膜结构以及铁电性能进行表征。XRD结果表明成功制备钛酸铋纯相,FESEM结果显示所有的薄膜与衬底间均有良好的接触,半导体测试以及铁电性能测试结果显示,转速为4500 r/min下制备的薄膜不仅具有最低的漏电流密度(2.60×10^(-6)A/cm^(2)),而且拥有最大的剩余极化强度(P_(r)=12.38μC/cm^(2))。Bi_(4)Ti_(3)O_(12) films were prepared on Pt(111)/Ti/SiO_(2)/Si substrates at different rotational speeds using the spin-coating method.The structure and ferroelectricity of the films were characterized by XRD,SEM,semiconductor test and ferroelectricity test.The result of XRD indicated that the bismuth titanate purephase was prepared successfully.The results of semiconductor test and ferroelectricity test indicated that the film prepared at 4500 r/min has not only the lowest leakage current(2.60×10^(-6) A/cm^(2))but also the maximum remnant polarization intensity(P_(r)=12.38μC/cm^(2)).

关 键 词：薄膜 漏电流密度 铁电性能 

分 类 号：TB383[一般工业技术—材料科学与工程]