Mo浓度渐变的AlCrMoSiN刀具涂层调控及切削性能  

Regulation and cutting performance of AlCrMoSiN tool coatings with gradually increasing Mo concentration

作　　者：张蕊 刘艳梅[1] 朱建博 许梦娇 姜肃猛[2] 王铁钢[1] ZHANG Rui;LIU Yanmei;ZHU Jianbo;XU Mengjiao;JIANG Sumeng;WANG Tiegang(Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin 300222,China;Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China)

机构地区：[1]天津职业技术师范大学,天津市高速切削与精密加工重点实验室,天津300222 [2]中国科学院金属研究所材料表面工程研究部,沈阳110016

出　　处：《中国有色金属学报》2024年第7期2240-2256,共17页The Chinese Journal of Nonferrous Metals

基　　金：天津市多元投入基金资助项目(22JCZDJC00670,22JCYBJC01600);天津市教委科研计划重点项目(2022ZD020,2022ZD033)。

摘　　要：采用高功率脉冲磁控溅射和脉冲直流磁控溅射复合技术制备Mo浓度渐变的AlCrMoSiN梯度涂层,利用XRD、SEM和TEM、纳米压痕仪、划痕仪、高温摩擦试验机和立式加工中心对涂层微观结构和性能进行表征和测试。结果表明:沿涂层生长方向,随着Mo浓度渐变速率的增加,涂层硬度和弹性模量逐渐增大;临界载荷、摩擦因数和磨损率略有下降。当CrMo靶溅射功率从0.4 kW线性增至1.2 kW时,制备的AlCrMoSiN梯度涂层(涂层Ⅲ)硬度和弹性模量达到最大值,分别为23.8 GPa和317.7 GPa,临界载荷约57.3 N,此时摩擦因数和磨损率分别为0.51和2.20×10^(−8) mm^(3)/(N·mm),涂层耐磨性能最佳。经干铣削淬硬模具钢(P20H)试验,AlCrMoSiN梯度涂层铣刀的使用寿命比AlCrSiN涂层铣刀提高24.1%,连续切削40 min时,其切削温度比AlCrSiN涂层铣刀低65.1℃。A series of AlCrMoSiN coatings with gradual Mo concentration were prepared by high power pulsed magnetron sputtering and pulsed DC magnetron sputtering hybrid technique,and the microstructure and properties of the coatings were characterized and tested using XRD,SEM and TEM,nanoindentation,scratching,high temperature tribology testing and vertical machining centre.The results show that the hardness and elastic modulus of the coatings gradually increase with the increase of the gradient rate of Mo concentration along the growth direction of the coatings;while the critical load,friction coefficient and wear rate decrease slightly.When the sputtering power of the CrMo target linearly increases from 0.4 kW to 1.2 kW,the hardness and elastic modulus of the prepared AlCrMoSiN gradient coatings(CoatingⅢ)reach the maximum values of 23.8 GPa and 317.7 GPa,respectively;the critical load is about 57.3 N;the friction coefficient and wear rate are 0.51 and 2.20×10^(−8) mm^(3)/(N·mm),when the coating has the best wear resistance.Through dry milling hardened mold steel(P20H)test,the service life of AlCrMoSiN gradient coated tool is 24.1%higher than that of AlCrSiN coated tool.After continuous cutting for 40 min,and the cutting temperature is 65.1℃lower than that of the AlCrSiN coated tool.

关 键 词：AlCrMoSiN自润滑涂层 高功率脉冲磁控溅射 力学性能 摩擦学行为 切削性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]