A 128×128 SPAD LiDAR sensor with column-parallel 25 ps resolution TA-ADCs  

作　　者：Na Tian Zhe Wang Kai Ma Xu Yang Nan Qi Jian Liu Nanjian Wu Runjiang Dou Liyuan Liu 

机构地区：[1]State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Journal of Semiconductors》2024年第8期34-40,共7页半导体学报（英文版）

基　　金：supported by National Science and Technology Major Project(Grant No.2021ZD0109801);in part by the Beijing Municipal Science and Technology Project(Grant No.Z221100007722028);in part by the National Natural Science Foundation of China(Grant No.62334008).

摘　　要：This paper presents a design of single photon avalanche diode(SPAD)light detection and ranging(LiDAR)sensor with 128×128 pixels and 128 column-parallel time-to-analog-merged-analog-to-digital converts(TA-ADCs).Unlike the conventional TAC-based SPAD LiDAR sensor,in which the TAC and ADC are separately implemented,we propose to merge the TAC and ADC by sharing their capacitors,thus avoiding the analog readout noise of TAC’s output buffer,improving the conversion rate,and reducing chip area.The reverse start-stop logic is employed to reduce the power of the TA-ADC.Fabricated in a 180 nm CMOS process,our prototype sensor exhibits a timing resolution of 25 ps,a DNL of+0.30/−0.77 LSB,an INL of+1.41/−2.20 LSB,and a total power consumption of 190 mW.A flash LiDAR system based on this sensor demonstrates the function of 2D/3D imaging with 128×128 resolution,25 kHz inter-frame rate,and sub-centimeter ranging precision.

关 键 词：3D imaging CMOS imagers direct time-of-flight(dTOF) time-to-analog converter(TAC) 

分 类 号：TN958.98[电子电信—信号与信息处理]