A review of ultrafast laser micro/nano fabrication:Material processing,surface/interface controlling,and devices fabrication  

作　　者：Heng Guo Jiawang Xie Guangzhi He Dezhi Zhu Ming Qiao Jianfeng Yan Jiachen Yu Jiaqun Li Yuzhi Zhao Ma Luo Haoze Han 

机构地区：[1]State Key Laboratory of Tribology in Advanced Equipment,Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China

出　　处：《Nano Research》2024年第7期6212-6230,共19页纳米研究（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.52075289);the Tsinghua-Jiangyin Innovation Special Fund(TJISF,No.2023JYTH0104).

摘　　要：Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable processing precision,diverse processing capabilities,and broad material adaptability.The processing abilities and applications of the ultrafast laser still need more exploration.In the field of material processing,controlling the atomic scale structure in nanomaterials is challenging.Complex effects exist in ultrafast laser surface/interface processing,making it difficult to modulate the nanostructure and properties of the surface/interface as required.In the ultrafast laser fabrication of micro functional devices,the processing ability needs to be improved.Here,we review the research progress of ultrafast laser micro/nano fabrication in the areas of material processing,surface/interface controlling,and micro functional devices fabrication.Several useful ultrafast laser processing methods and applications in these areas are introduced.With various processing effects and abilities,the ultrafast laser processing technology has demonstrated application values in multiple fields from science to industry.

关 键 词：ultrafast laser micro/nano fabrication material processing surface/interface controlling devices fabrication 

分 类 号：TN24[电子电信—物理电子学]