3D封装玻璃通孔高频特性分析与优化  

High-Frequency Characteristic Analysis and Optimization of 3D-Packaging Through Glass Via

作　　者：黄根信 黄春跃[2] 李鹏[1] 谭丽娟 HUANG Genxin;HUANG Chunyue;LI Peng;TAN Lijuan(School of Ocean Engineering,Guilin University of Electronic Technology,Beihai,Guangxi 536000,P.R.China;School of Electro-Mechanical Engineering,Guilin University of Electronic Technology,Guiling,Guangxi 541000,P.R.China;Teaching and Technology Department,Guilin University of Electronic Technology,Beihai,Guangxi 536000,P.R.China)

机构地区：[1]桂林电子科技大学海洋工程学院,广西北海536000 [2]桂林电子科技大学机电工程学院,广西桂林541000 [3]桂林电子科技大学教学科技部,广西北海536000

出　　处：《微电子学》2024年第2期298-303,共6页Microelectronics

基　　金：国家自然科学基金资助项目(62164002);广西科技重大专项资助项目(桂科AA19046004);广西自然科学基金资助项目(2020GXNSFAA159071)。

摘　　要：建立了3D封装玻璃通孔(TGV)电磁仿真分析模型,对TGV高频信号特性进行了分析,得到了回波损耗S11仿真结果,并研究了信号频率、通孔类型、通孔最大直径、通孔高度、通孔最小直径对S11的影响。选取TGV关键结构通孔最大直径、通孔高度、通孔最小直径尺寸为设计参数,以TGV在信号频率10 GHz下的S11作为目标值,采用响应曲面法,设计17组试验进行仿真,并拟合了TGV S11与其关键结构参数的关系模型。结合遗传算法对拟合模型进行优化,得到TGV S11最优的组合参数:通孔最大直径65μm、通孔高度360μm、通孔最小直径尺寸44μm。对最优组合参数进行验证,发现最优参数组合仿真结果较基本模型S11减小了1.593 5 dB,实现了TGV的结构优化。A simulation analysis model of a 3D-packaging through glass via(TGV)was established.The high-frequency signal characteristics of TGV were analyzed,and the simulation results of the return loss(S11)were obtained.The influences of the signal frequency,type,maximum diameter,height,and minimum diameter of the TGV on the S11 were studied.The maximum diameter,height,and minimum diameter of the TGV were selected as the design parameters,and the S11 at 10 GHz was obtained as the target value.Seventeen groups of experimental simulation calculations were designed using the response surface method,and the relationship between the S11 of the TGV and its key structural parameters was fitted.The fitting model was optimized by combining a genetic algorithm,and the optimal combination parameters of the TGV S11 were obtained as follows:a maximum diameter of 65μm,height of 360μm,and minimum diameter of 44μm.The optimal combination parameters were verified.The simulation results of the optimal combination parameters are 1.5935 dB less than the S11 of the basic model,and the structure of the TGV is optimized.

关 键 词：玻璃通孔 高频特性 回波损耗 结构优化 

分 类 号：TN405[电子电信—微电子学与固体电子学]