时间比值法测量水蒸气流导  

Conductance Measurement of Water Vapor by the Time-Ratio Method

作　　者：耿健 王晓冬[1] 郭美如 任正宜[2] GENG Jian;WANG Xiao-dong;GUO Mei-ru;REN Zheng-yi(School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,China;Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110819 [2]兰州空间技术物理研究所真空技术与物理重点实验室,甘肃兰州730000

出　　处：《东北大学学报（自然科学版）》2024年第5期707-712,共6页Journal of Northeastern University(Natural Science)

基　　金：国家自然科学基金资助项目(61971209)。

摘　　要：目前很少有方法能够测量水蒸气通过小孔的流导.通过理论与实验相结合的方法分析了使用压升法测量水蒸气流导的可行性,该方法测量结果的误差随着进气量的减小而增加,这是因为水蒸气具有较强的吸附特性.为了准确得到水蒸气进气压力与流导之间的关系式,基于压升法提出了时间比值法.该方法通过测量压力变化的时间计算流导,有效地减小了水蒸气吸附作用对测量结果的影响.使用该方法搭建了一个可以提供流量为3.7×10^(-9)~1.5×10^(-5)Pa·m^(3)·s^(-1)的装置.流导测量值与理论值一致性较好.时间比值法的相对标准不确定度是3.3%.There are currently few methods available to measure the conductance of water vapor through an orifice.The feasibility of the pressure rising method to measure the conductance of water vapor is analyzed by combining theory with experiment,indicating that the measurement error of this method increases with the decrease of intake volume,which is due to the strong adsorption characteristic of water vapor.To accurately obtain the relationship between the conductance of water vapor and the inlet pressure,a new method called the time-ratio method is proposed.This method calculates conductance by measuring the time of pressure change,reducing the effect of water vapor adsorption on the measurement effectively.Based on this method,a device is developed to provide a flow rate in the range of 3.7×10^(-9)~1.5×10^(-5)Pa·m^(3)·s^(-1).The measurement and theoretical values of conductance have good consistency,and the relative standard uncertainty of this time‑ratio method is 3.3%.

关 键 词：水蒸气 流导 不确定度 测量 

分 类 号：TB753[一般工业技术—真空技术]