基于数字孪生仿真的半导体可重入混合流水车间联合调度优化研究  

Optimization study of joint scheduling for semiconductor reentrant hybrid flow shop based on digital twin simulation

作　　者：刘亮 贺禹铭 姚春琦 霍艳芳[2] LIU Liang;HE Yuming;YAO Chunqi;HUO Yanfang(School of Economics and Management,Tiangong University,Tianjin 300387;College of Management and Economics,Tianjin University,Tianjin 300072)

机构地区：[1]天津工业大学经济与管理学院,天津300387 [2]天津大学管理与经济学部,天津300072

出　　处：《机械设计》2024年第6期102-113,共12页Journal of Machine Design

基　　金：国家自然科学基金重点项目(92167206);国家科技部创新方法工作专项(2020IM030300)。

摘　　要：在新一代信息技术与高端制造产业加速融合渗透的背景下,文中针对半导体车间订单动态到达、车间生产信息透明度低的问题,提出了一种基于数字孪生仿真的半导体可重入混合流水车间联合调度方法。首先,设计了一种基于AnyLogic的数字孪生仿真架构,并在此基础上构建了高保真数字孪生仿真模型,对多源异构数据虚实交互、多维多尺度孪生模型运行机理进行了深入探讨;其次,综合考虑最大完工时间、碳排放量和AGV利用率建立联合调度模型,提出了一种结合数字孪生的ENSGA-Ⅱ算法进行求解,并将其嵌入AnyLogic孪生模型实现实时调度;最后,基于差异化场景和半导体车间任务实例,验证了所提方法的有效性。In the context of accelerated integration and penetration of the new-generation information technologies and the high-end manufacturing industry,due to the poor dynamic arrival of orders in semiconductor workshops and the low transparency of the information on workshop production,in this article joint scheduling based on digital twin simulation is proposed for the sem-iconductor reentrant hybrid flow shop.Firstly,an architecture of digital twin simulation is designed according to AnyLogic;a high-fidelity model of digital twin simulation is constructed;the in-depth analysis is conducted on the operation mechanism of the multi-dimensional and multi-scale twin model characterized by multi-source heterogeneous data virtual-real interaction.Secondly,with the maximum completion time,the carbon emission and the AGV utilization rate taken into consideration,the model of joint scheduling is worked out;the ENSGA-I algorithm combined with digital twin is proposed to solve the problem and then embedded in the AnyLogic twin model,so as to realize real-time scheduling.Finally,through the differentiated scenarios and the examples of the semiconductor workshop tasks,it is verified that this method is effective.

关 键 词：半导体 可重入混合流水车间 数字孪生仿真 联合调度 ANYLOGIC 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]