Precise mode control of laser-written waveguides for broadband,low-dispersion 3D integrated optics  

作　　者：Yuying Wang Lijing Zhong Kuen Yao Lau Xuhu Han Yi Yang Jiacheng Hu Sergei Firstov Zhi Chen Zhijun Ma Limin Tong Kin Seng Chiang Dezhi Tan Jianrong Qiu 

机构地区：[1]College of Optical Science and Engineering,Zhejiang University,310027,Hangzhou,China [2]Institute of Light+X Science and Technology,College of Information Science and Engineering,Ningbo University,315211,Ningbo,China [3]School of Optoelectronic Science and Engineering&Collaborative Innovation Center of Suzhou Nano Science and Technology,Soochow University,215006,Suzhou,China [4]Prokhorov General Physics Institute of the Russian Academy of Sciences,Dianov Fiber Optics Research Center,38 Vavilov str.,Moscow,119333,Russia [5]Zhejiang Lab,311121,Hangzhou,China [6]College of Materials Science and Engineering,Key Laboratory of Advanced Materials of Yunnan Province,Kunming University of Science and Technology,650093,Kunming,Yunnan,China [7]Department of Electrical Engineering,City University of Hong Kong,83 Tat Chee Avenue,Kowloon,Hong Kong SAR,China [8]School of Materials Science and Engineering,Zhejiang University,310027,Hangzhou,China

出　　处：《Light(Science & Applications)》2024年第6期1186-1195,共10页光（科学与应用)（英文版）

基　　金：supported by the National Key R&D Program of China (No.2021YFB2802000);National Natural Science Foundation of China (Nos.U20A20211,62275233,62005164,62375246,and 62105297);“Pioneer”and“Leading Goose”R&D Program of Zhejiang (2023C03089);Zhejiang Provincial Natural Science Foundation (Nos.LZ23F050002 and LQ22F050022).

摘　　要：Three-dimensional(3D)glass chips are promising waveguide platforms for building hybrid 3D photonic circuits due to their 3D topological capabilities,large transparent windows,and low coupling dispersion.At present,the key challenge in scaling down a benchtop optical system to a glass chip is the lack of precise methods for controlling the mode field and optical coupling of 3D waveguide circuits.Here,we propose an overlap-controlled multi-scan(OCMS)method based on laser-direct lithography that allows customizing the refractive index profile of 3D waveguides with high spatial precision in a variety of glasses.On the basis of this method,we achieve variable mode-field distribution,robust and broadband coupling,and thereby demonstrate dispersionless LP21-mode conversion of supercontinuum pulses with the largest deviation of<0.1 dB in coupling ratios on 210 nm broadband.This approach provides a route to achieve ultra-broadband and low-dispersion coupling in 3D photonic circuits,with overwhelming advantages over conventional planar waveguide-optic platforms for on-chip transmission and manipulation of ultrashort laser pulses and broadband supercontinuum.

关 键 词：WAVEGUIDE mode DISPERSION 

分 类 号：TN25[电子电信—物理电子学]