基于可重构硅光滤波器的计算重建片上光谱仪  

Computational reconstruction on-chip spectrometer based on reconfigurable silicon photonic filters

作　　者：张赞[1] 黄北举[2,3] 陈弘达 Zhang Zan;Huang Bei-Ju;Chen Hong-Da(School of Electronics and Control Engineering,Chang’an University,Xi’an 710018,China;Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]长安大学电子与控制工程学院,西安710018 [2]中国科学院半导体研究所,光电材料与器件重点实验室,北京100083 [3]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《物理学报》2024年第14期34-42,共9页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:62341508);中国科学院青年创新促进会(批准号:Y2022045)资助的课题.

摘　　要：相比于笨重的台式光谱仪,集成化的芯片级光谱仪可以应用于便携式的健康监测、环境检测等场景.我们设计了一个基于硅光子平台的片上光谱仪.该器件由一个透射光谱可重构的硅光滤波器构成.通过改变滤波器的透射光谱,可以实现对输入光谱的多次且不同的采样.再结合人工神经网络算法,从采样后的信号中重建出入射光谱.可重构的硅光滤波器由互相耦合的马赫曾德干涉仪和微环谐振腔组成.采用集成的热光相移器引入相位变化,能够对滤波器的透射光谱进行重构.通过这种方式,基于单个可重构滤波器可得到包含宽、窄光谱多样特征的响应函数.不需要滤波器阵列,就可以实现对入射光谱的多样化采样,能够显著地减小光谱检测器件的面积.仿真结果表明,所设计的器件在1500—1600 nm波长范围内可以实现连续光谱和稀疏光谱的重建,分辨率约为0.2 nm.该器件在可穿戴光学传感、便携式光谱仪等场景中具有巨大的应用潜力.Spectroscopic analysis technique is an indispensable tool in many disciplines such as biomedical research,materials science,and remote sensing.Traditional benchtop spectrometers have several drawbacks;bulky,complex,and expensive,making them ineffective for emerging applications such as wearable health monitoring and Lab-on-Chip systems.Compared with bulky desktop spectrometers,integrated chip-level spectrometers find many applications in portable health monitoring,environmental sensing,and other scenarios.We design an onchip spectrometer based on a silicon photonics platform.The device consists of a silicon photonic filter with a reconfigurable transmission spectrum.By changing the transmission spectrum of the filter,the multiple and diverse sampling of the input spectrum can be obtained.Using an artificial neural network algorithm,the incident spectrum is reconstructed from the sampled signals.The reconfigurable silicon photonic filter is composed of intercoupled Mach-Zehnder interferometer and micro-ring resonator.The introduction of thermal-optic phase shifter facilitates the reconstruction of the transmission spectrum of filter.Through this approach,a response function encompassing diverse features of broad and narrow spectra can be obtained from a single reconfigurable filter,eliminating the need for a filter array and significantly reducing the footprint of the spectrometer.Simulation results demonstrate that the designed device can achieve continuous and sparse spectrum reconstruction in a wavelength range of 1500–1600 nm,with a resolution of approximately 0.2 nm.On a test set composed of synthetic spectra,the calculated average RMSE for the reconstructed spectra is 0.0075,with an average relative error of 0.0174.Owing to the reconfigurable nature of the silicon photonic filter,this device exhibits the ability to flexibly adjust the number of sampling channels,thus enabling users to configure the chip according to specific application scenarios.This device possesses significant potential applications suc

关 键 词：计算光谱重建 可重构硅光滤波器 深度学习 光子集成回路 

分 类 号：TN713[电子电信—电路与系统] TH744.1[机械工程—光学工程]