偏振调制扫描光学显微镜方法  

Polarization modulation scanning optical microscopy method

作　　者：张洋[1] 张志豪 王宇剑 薛晓兰 陈令修 石礼伟[1] Zhang Yang;Zhang Zhi-Hao;Wang Yu-Jian;Xue Xiao-Lan;Chen Ling-Xiu;Shi Li-Wei(School of Materials Science and Physics,China University of Mining and Technology,Xuzhou 221116,China)

机构地区：[1]中国矿业大学材料与物理学院,徐州221116

出　　处：《物理学报》2024年第15期187-195,共9页Acta Physica Sinica

基　　金：国家自然科学基金专项基金(批准号:62341406);江苏省基础研究计划(自然科学基金)-青年基金(批准号:BK20221113);徐州市科技项目-基础研究计划(批准号:KC23004)资助的课题

摘　　要：基于反射差分谱原理搭建了适用于二维材料和微纳器件的偏振调制扫描光学显微镜系统,可以实现对于材料或者器件的微米级区域进行反射差分显微成像的研究.通过研究两种典型的二维层状材料MoS_(2)和ReSe_(2)的反射差分显微成像,发现相比于传统的反射显微镜,我们搭建的偏振调制扫描光学显微镜对于二维材料的层数特征更敏感,且可以用来表征二维材料的平面光学各向异性.相关研究有助于更进一步理解层状二维材料的层数特征和各向异性性质.Since the discovery of monolayer graphene,the novel physical properties of two-dimensional(2D)materials,particularly those with fewer layers that often exhibit unique properties different from bulk materials,have received significant attention.Therefore,accurately determining the layer number or obtaining the microscopic surface morphology is crucial in the laboratory fabrication and during device manufacturing.However,traditional detection methods have numerous drawbacks.There is an urgent need for a convenient,accurate,and non-destructive scientific method to characterize the layer number and surface microstructure of 2D materials.By combining the experimental setup of laser scanning photocurrent spectroscopy,we develop a polarization-modulated scanning optical microscope based on the principle of reflectance difference spectroscopy.By monitoring the reflectivity of the samples,we can observe changes in the reflection signal strength of MoS_(2) with different layer numbers.The intensity of the reflectance differential spectral signal reflects changes in the layer count within the sample.We can characterize the changes in the number of layers of 2D materials in a non-contact manner by using polarization-modulated scanning optical microscopy.Through the study of the reflectance differential spectra of two typical 2D layered materials,MoS_(2) and ReSe_(2),we find that our polarization-modulated scanning optical microscope system is also more sensitive to the characteristics of the stacking anisotropy of the 2D materials than the conventional reflection microscope.This indicates that our research contributes to a better understanding of the layer number characteristics and anisotropic properties of layered 2D materials.Furthermore,our research also provides a non-contact optical method to characterize the number of layers and optical anisotropy of two-dimensional layered material.

关 键 词：反射各向异性光谱 显微成像 光学各向异性 二维材料 

分 类 号：TH742[机械工程—光学工程]