柔性压电薄膜传感器的设计  

Design of Flexible Piezoelectric Thin Film Sensor

作　　者：黄瑞 陈海荣 李奕珩 薛民新 付浩 郑尚岗 张一建 马文慧 Huang Rui;Chen Hairong;Li Yiheng

机构地区：[1]宁波大学机械工程与力学学院,浙江宁波315211

出　　处：《机械制造》2024年第7期54-59,91,共7页Machinery

摘　　要：现有传感器在能量供应、柔韧性、耐用性等方面存在一些问题,对此,设计了柔性压电薄膜传感器。利用粒子型柔性压电复合材料,将无机压电陶瓷颗粒锆钛酸铅分散在高分子基体聚氨酯中,制备出柔性压电薄膜传感器,在曲面下具有高灵敏检测能力,实现无源传感。介绍了柔性压电薄膜传感器的基本原理、制备方法、响应机制、微观表征和性能测试。柔性压电薄膜传感器未来在人机交互、工业制造、智能可穿戴领域具有应用价值。There are some problems in the energy supply,flexibility,durability and other aspects of the existing sensor,in this regard,a flexible piezoelectric thin film sensor was designed.The flexible piezoelectric thin film sensor was prepared by dispersing inorganic piezoelectric ceramic particle lead zirconate titanate in polymer matrix polyurethane by using particle-type flexible piezoelectric composite,which has high-sensitivity detection ability under curved surface and realizes passive sensing.The basic principle,preparation method,response mechanism,microscopic characterization and performance test of the flexible piezoelectric thin film sensor were introduced.The flexible piezoelectric thin film sensor will have application value in the fields of human-computer interaction,industrial manufacturing,and smart wearable in the future.

关 键 词：压电 薄膜 传感器 设计 

分 类 号：TP212.4[自动化与计算机技术—检测技术与自动化装置]