Influence of Film Thickness on Nanofabrication of Graphene Oxide  

作　　者：Chuan Tang Lei Chen Linmao Qian 

机构地区：[1]Tribology Research Institute,The State Key Laboratory of Rail Vehicle System,School of Mechanical Engineering,Southwest Jiaotong University,Chengdu 610031,China

出　　处：《Nanomanufacturing and Metrology》2024年第2期13-25,共13页纳米制造与计量（英文）

基　　金：supported by the National Natural Science Foundation of China(Nos.52350411,52122507 and 52235004);Sichuan Science and Technology Program(2023NSFSC1988 and 2023YFSY0004);the Fundamental Research Funds for the Central University(No.2682021ZTPY095).

摘　　要：Nanofabrication of two-dimensional materials through mechanical machining is normally influenced by not only process parameters such as load and velocity but also intrinsic properties such as strength and thickness.Herein,we examined the effects of graphene oxide(GO)film thickness on nanofabrication on the plane surfaces and at the step edges using scanning probe microscope lithography.The material removal of GO initiates at the load above a critical value,which strongly depends on film thickness and locations.With the increase in film thickness,the critical load decreases monotonically on the plane surfaces but increases gradually at the step edges.Further,the critical load for the GO monolayer at the step edges is at least 25 times lower than that on the plane surfaces,and the gap decreases to around 3 times when GO thickness increases to four layers.Then,mechanical nanofabrication initiating from the GO step edge allows producing various nanopatterns under extremely low loads around 1 nN.Finally,the GO nanostructures are deoxidized by annealing at 800°C in high-purity argon to restore their highly functionalized conjugated structures,which are supported by X-ray diffraction and Raman characterizations.This work provides a novel approach to fabricating graphene-like nanostructures by deoxidizing GO after nanofabrication,which holds significant potential for applications in graphene-based devices.

关 键 词：Graphene oxide Nanofabrication Film thickness step edge NANOPATTERN Deoxidized treatment 

分 类 号：TQ127.11[化学工程—无机化工] TB383[一般工业技术—材料科学与工程]